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Title
Cited by
Cited by
Year
Low-temperature Al2O3 atomic layer deposition
MD Groner, FH Fabreguette, JW Elam, SM George
Chemistry of Materials 16 (4), 639-645, 2004
17542004
Electrical characterization of thin Al< sub> 2</sub> O< sub> 3</sub> films grown by atomic layer deposition on silicon and various metal substrates
MD Groner, JW Elam, FH Fabreguette, SM George
Thin Solid Films 413 (1), 186-197, 2002
928*2002
Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition
JW Elam, MD Groner, SM George
Review of Scientific Instruments 73 (8), 2981-2987, 2002
7112002
Ultrathin Direct Atomic Layer Deposition on Composite Electrodes for Highly Durable and Safe Li‐Ion Batteries
YS Jung, AS Cavanagh, LA Riley, SH Kang, AC Dillon, MD Groner, ...
Advanced Materials 22 (19), 2172-2176, 2010
6232010
Ca test of Al 2 O 3 gas diffusion barriers grown by atomic layer deposition on polymers
PF Carcia, RS McLean, MH Reilly, MD Groner, SM George
Applied physics letters 89 (3), 031915-031915-3, 2006
5352006
Gas diffusion barriers on polymers using Al 2 O 3 atomic layer deposition
MD Groner, SM George, RS McLean, PF Carcia
Applied Physics Letters 88 (5), 051907-051907-3, 2006
4922006
Enhanced Stability of LiCoO₂ Cathodes in Lithium-ion Batteries Using Surface Modification by Atomic Layer Deposition
YS Jung, AS Cavanagh, AC Dillon, MD Groner, SM George, SH Lee
Journal of the Korean Ceramic Society 47 (1), 61-65, 2010
4742010
Enhanced stability of LiCoO2 cathodes in lithium-ion batteries using surface modification by atomic layer deposition
YS Jung, AS Cavanagh, AC Dillon, MD Groner, SM George, SH Lee
Journal of The Electrochemical Society 157 (1), A75-A81, 2010
4742010
Gas diffusion ultrabarriers on polymer substrates using Al2O3 atomic layer deposition and SiN plasma-enhanced chemical vapor deposition
PF Carcia, RS McLean, MD Groner, AA Dameron, SM George
Journal of Applied Physics 106 (2), 023533, 2009
2732009
Atomic layer deposition on particles using a fluidized bed reactor with in situ mass spectrometry
DM King, JA Spencer II, X Liang, LF Hakim, AW Weimer
Surface and Coatings Technology 201 (22), 9163-9171, 2007
2302007
Growth and Properties of Hybrid Organic‐Inorganic Metalcone Films Using Molecular Layer Deposition Techniques
BH Lee, B Yoon, AI Abdulagatov, RA Hall, SM George
Advanced Functional Materials 23 (5), 532-546, 2013
1702013
Novel processing to produce polymer/ceramic nanocomposites by atomic layer deposition
X Liang, LF Hakim, GD Zhan, JA McCormick, SM George, AW Weimer, ...
Journal of the American Ceramic Society 90 (1), 57-63, 2007
1302007
Molecular layer deposition of titanicone films using ticl4 and ethylene glycol or glycerol: Growth and properties
AI Abdulagatov, RA Hall, JL Sutherland, BH Lee, AS Cavanagh, ...
Chemistry of Materials 24 (15), 2854-2863, 2012
1282012
Protecting polymers in space with atomic layer deposition coatings
TK Minton, B Wu, J Zhang, NF Lindholm, AI Abdulagatov, J O’Patchen, ...
ACS applied materials & interfaces 2 (9), 2515-2520, 2010
1252010
Metalcones: Hybrid Organic–Inorganic Films Fabricated Using Atomic and Molecular Layer Deposition Techniques
SM George, BH Lee, B Yoon, AI Abdulagatov, RA Hall
Journal of nanoscience and nanotechnology 11 (9), 7948-7955, 2011
922011
Health, mental well-being, and musculoskeletal disorders: a comparison between Swedish and Australian dental hygienist.
V Ylipää, F Szuster, J Spencer, H Preber, SS Benko, BB Arnetz
Journal of dental hygiene: JDH/American Dental Hygienists' Association 76 (1 …, 2001
792001
Importance of trimethylaluminum diffusion in three-step ABC molecular layer deposition using trimethylaluminum, ethanolamine, and maleic anhydride
D Seghete, RA Hall, B Yoon, SM George
Langmuir 26 (24), 19045-19051, 2010
652010
Atmospheric pressure spatial atomic layer deposition web coating with in situ monitoring of film thickness
AS Yersak, YC Lee, JA Spencer, MD Groner
Journal of Vacuum Science & Technology A 32 (1), 01A130, 2013
562013
Barrier properties of polymer/alumina nanocomposite membranes fabricated by atomic layer deposition
X Liang, DM King, MD Groner, JH Blackson, JD Harris, SM George, ...
Journal of Membrane Science 322 (1), 105-112, 2008
522008
Atomic layer deposition of solid lubricating coatings on particles
OJ Kilbury, KS Barrett, X Fu, J Yin, DS Dinair, CJ Gump, AW Weimer, ...
Powder Technology 221, 26-35, 2012
442012
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