Surface phenomena related to mirror degradation in extreme ultraviolet (EUV) lithography TE Madey, NS Faradzhev, BV Yakshinskiy, NV Edwards Applied Surface Science 253 (4), 1691-1708, 2006 | 168 | 2006 |
Stability of water monolayers on Ru (0 0 0 1): Thermal and electronically induced dissociation NS Faradzhev, KL Kostov, P Feulner, TE Madey, D Menzel Chemical physics letters 415 (1-3), 165-171, 2005 | 106 | 2005 |
Accelerated lifetime metrology of EUV multilayer mirrors in hydrocarbon environments SB Hill, NS Faradzhev, C Tarrio, TB Lucatorto, TE Madey, BV Yakshinskiy, ... Emerging Lithographic Technologies XII 6921, 348-358, 2008 | 31 | 2008 |
Electron-driven chemistry of halogenated compounds in condensed phases: Effects of solvent matrices on reaction dynamics and kinetics TE MADEY | 26 | 2004 |
SURF III: A flexible synchrotron radiation source for radiometry and research U Arp, C Clark, L Deng, N Faradzhev, A Farrell, M Furst, S Grantham, ... Nuclear Instruments and Methods in Physics Research Section A: Accelerators …, 2011 | 25 | 2011 |
Hydrogen mediated transport of Sn to Ru film surface N Faradzhev, V Sidorkin Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 27 (2 …, 2009 | 25 | 2009 |
Kinetics of electron-induced decomposition of coadsorbed with water (ice): A comparison with NS Faradzhev, CC Perry, DO Kusmierek, DH Fairbrother, TE Madey The Journal of chemical physics 121 (17), 8547-8561, 2004 | 25 | 2004 |
Surface crystallography by forward-focusing of quasi-elastically reflected electrons: Physical basis and applications NS Faradzhev, MV Gomoyunova, II Pronin PHYSICS OF LOW-DIMENSIONAL STRUCTURES 3, 93-112, 1997 | 25 | 1997 |
Chemical Reactions in CF2Cl2/Water (Ice) Films Induced by X-ray Radiation CC Perry, GM Wolfe, AJ Wagner, J Torres, NS Faradzhev, TE Madey, ... The Journal of Physical Chemistry B 107 (46), 12740-12751, 2003 | 20 | 2003 |
The Co/Si (111) interface formation: a temperature dependent reaction P Luches, A Rota, S Valeri, II Pronin, DA Valdaitsev, NS Faradzhev, ... Surface science 511 (1-3), 303-311, 2002 | 19 | 2002 |
Complex species and pressure dependence of intensity scaling laws for contamination rates of EUV optics determined by XPS and ellipsometry SB Hill, NS Faradzhev, LJ Richter, TB Lucatorto Extreme Ultraviolet (EUV) Lithography 7636, 127-136, 2010 | 17 | 2010 |
Optics contamination studies in support of high-throughput EUV lithography tools SB Hill, NS Faradzhev, LJ Richter, S Grantham, C Tarrio, TB Lucatorto, ... Extreme Ultraviolet (EUV) Lithography II 7969, 202-213, 2011 | 16 | 2011 |
Measuring the EUV-induced contamination rates of TiO2-capped multilayer optics by anticipated production-environment hydrocarbons SB Hill, NS Faradzhev, CS Tarrio, TB Lucatorto, RA Bartynski, ... Alternative Lithographic Technologies 7271, 298-308, 2009 | 14 | 2009 |
Focusing medium energy electrons on quasielastic reflection from a crystal MV Gomoyhnova, II Pronin, NS Faradzhev Zhurnal Ehksperimental'noj i Teoreticheskoj Fiziki 110 (1), 311-321, 1996 | 14 | 1996 |
Electron-stimulated desorption of F+ and F− from SF6 on Ru (0001): structure and bonding NS Faradzhev, DO Kusmierek, BV Yakshinskiy, SM Solovev, TE Madey Surface Science 528 (1-3), 20-26, 2003 | 13 | 2003 |
Quantitative analysis of trace levels of surface contamination by X‐ray photoelectron spectroscopy. Part II: Systematic uncertainties and absolute quantification NS Faradzhev, SB Hill, CJ Powell Surface and Interface Analysis 49 (12), 1214-1224, 2017 | 12 | 2017 |
Electron stimulated reactions of methyl iodide coadsorbed with amorphous solid water CC Perry, NS Faradzhev, TE Madey, DH Fairbrother The Journal of chemical physics 126 (20), 2007 | 12 | 2007 |
In-situ intercalation of VSe2 (0001) with K: direct observation of near-surface structure transformation by incoherent medium-energy electron diffraction II Pronin, MV Gomoyunova, NS Faradzhev, DA Valdaitsev, HI Starnberg Surface science 461 (1-3), 137-145, 2000 | 12 | 2000 |
EUV-Driven Carbonaceous Film Deposition and Its Photo-oxidation on a TiO2 Film Surface NS Faradzhev, M McEntee, JT Yates Jr, SB Hill, TB Lucatorto The Journal of Physical Chemistry C 117 (44), 23072-23081, 2013 | 11 | 2013 |
Focusing of medium-energy electrons upon quasielastic reflection from a crystal MV Gomoyunova, II Pronin, NS Faradzhev Journal of Experimental and Theoretical Physics 83 (1), 168-173, 1996 | 11 | 1996 |