Konner E. K. Holden

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John F. Conley, Jr.Professor of Electrical Engineering and Computer Science, Oregon State UniversityVerified email at eecs.oregonstate.edu
Melanie JenkinsDepartment of Electrical Engineering and Computer Science, Oregon State UniversityVerified email at oregonstate.edu
Dustin AustinLam ResearchVerified email at lamresearch.com
Jeffrey GambinoIBMVerified email at us.ibm.com
Christian KendrickOnsemiVerified email at onsemi.com
Sean Weston SmithRadiant Technologies Inc.Verified email at ferrodevices.com
M. David HenrySandia National Labs - Distinguished Member of the Technical StaffVerified email at sandia.gov
Joseph WoicikNISTVerified email at bnl.gov
Jon IhlefeldUniversity of VirginiaVerified email at virginia.edu
Conan WeilandNISTVerified email at bnl.gov
Samantha JaszewskiJill Hruby Postdoctoral Fellow, Sandia National LaboratoriesVerified email at sandia.gov
Shane WitsellOregon State UniversityVerified email at oregonstate.edu

Konner E. K. Holden

Lam Research

Verified email at lamresearch.com

Atomic Layer Deposition Low-k Reliability Packaging


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Atomic Layer Deposition of Transparent p-Type Semiconducting Nickel Oxide Using Ni(^tBu2DAD)₂ and Ozone KEK Holden, CL Dezelah, JF Conley Jr ACS applied materials & interfaces 11 (33), 30437-30445, 2019	23	2019
Electrode modulated capacitance-electric field nonlinearity in metal-insulator-metal capacitors DZ Austin, KEK Holden, J Hinz, JF Conley Jr Applied Physics Letters 110 (26), 263503, 2017	13	2017
Characterization of atomic layer deposited semiconducting Co₃O₄ KEK Holden, JF Conley Jr Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 37 (2 …, 2019	11	2019
Determination of Hafnium Zirconium Oxide Interfacial Band Alignments Using Internal Photoemission Spectroscopy and X-ray Photoelectron Spectroscopy MA Jenkins, KEK Holden, SW Smith, MT Brumbach, MD Henry, ... ACS Applied Materials & Interfaces 13 (12), 14634-14643, 2021	10	2021
Laminate Al₂O₃/Ta₂O₅ Metal/Insulator/Insulator/Metal (MIIM) Devices for High-Voltage Applications MA Jenkins, DZ Austin, KEK Holden, D Allman, JF Conley IEEE Transactions on Electron Devices 66 (12), 5260-5265, 2019	7	2019
Characterization of Atomic Layer Deposited Cobalt Oxide KEK Holden, MA Jenkins, JF Conley ECS Transactions 85 (13), 735-741, 2018	7	2018
Dielectric Relaxation, Aging and Recovery in High-K MIM Capacitors KEK Holden, GDR Hall, M Cook, C Kendrick, K Pabst, B Greenwood, ... 2021 IEEE International Reliability Physics Symposium (IRPS), 1-10, 2021	6*	2021
Precision defect engineering of metal/insulator/metal diodes using atomic layer deposition to localize Ni impurities in Al₂O₃ tunnel barriers KEK Holden, Y Qi, JF Conley Jr Journal of Applied Physics 129 (14), 144502, 2021	4	2021
Plasma-enhanced atomic layer deposition of WO₃-SiO₂ films using a heteronuclear precursor K Mullapudi, KEK Holden, JL Peterson, CL Dezelah, DF Moser, ... Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 41 (1 …, 2023	2	2023
Ultraviolet photo-enhanced atomic layer deposition for improving dielectric properties of low temperature deposited Al₂O₃ KEK Holden, SM Witsell, PC Lemaire, JF Conley Jr Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 40 (4 …, 2022	1	2022

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