| A Structured Data-Driven Framework for Virtual Metrology Modeling WT Yang, J Blue, A Roussy, J Pinaton, MS Reis IEEE Transactions on Automation Science and Engineering 17 (3), 1297-1306, 2019 | 21 | 2019 |
| An interpretable unsupervised Bayesian network model for fault detection and diagnosis WT Yang, MS Reis, V Borodin, M Juge, A Roussy Control Engineering Practice 127, 105304, 2022 | 16 | 2022 |
| A physics-informed Run-to-Run control framework for semiconductor manufacturing WT Yang, J Blue, A Roussy, J Pinaton, MS Reis Expert Systems with Applications 155, 113424, 2020 | 12 | 2020 |
| Virtual metrology modeling based on gaussian bayesian network WT Yang, J Blue, A Roussy, MS Reis, J Pinaton 2018 Winter Simulation Conference (WSC), 3574-3582, 2018 | 5 | 2018 |
| Advanced run-to-run controller in semiconductor manufacturing with real-time equipment condition WT Yang, J Blue, A Roussy, M Reis, J Pinaton 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC …, 2018 | 2 | 2018 |
