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Tae-Sun Yu
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Scheduling single-armed cluster tools with chamber cleaning operations
TS Yu, HJ Kim, TE Lee
IEEE Transactions on Automation Science and Engineering 15 (2), 705-716, 2017
432017
Scheduling dual-armed cluster tools with chamber cleaning operations
TS Yu, TE Lee
IEEE transactions on automation science and engineering 16 (1), 218-228, 2017
302017
Semiconductor manufacturing automation
TE Lee, HJ Kim, TS Yu
Springer Handbook of Automation, 841-863, 2023
222023
Minimization of waiting time variation in a generalized two-machine flowshop with waiting time constraints and skipping jobs
TS Yu, HJ Kim, TE Lee
IEEE Transactions on Semiconductor Manufacturing 30 (2), 155-165, 2017
212017
Scheduling proportionate flow shops with preventive machine maintenance
TS Yu, JH Han
International Journal of Production Economics 231, 107874, 2021
182021
Scheduling dual-armed cluster tools for concurrent processing of multiple wafer types with identical job flows
SG Ko, TS Yu, TE Lee
IEEE Transactions on Automation Science and Engineering 16 (3), 1058-1070, 2018
182018
Flow shops with reentry: Reversibility properties and makespan optimal schedules
TS Yu, M Pinedo
European Journal of Operational Research 282 (2), 478-490, 2020
172020
Wafer delay analysis and workload balancing of parallel chambers for dual-armed cluster tools with multiple wafer types
SG Ko, TS Yu, TE Lee
IEEE Transactions on Automation Science and Engineering 18 (3), 1516-1526, 2021
162021
Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations
TS Yu, TE Lee
International Journal of Production Research 58 (2), 434-447, 2020
142020
A new class of sequences without interferences for cluster tools with tight wafer delay constraints
Y Lim, TS Yu, TE Lee
IEEE Transactions on Automation Science and Engineering 16 (1), 392-405, 2018
142018
Adaptive scheduling of cluster tools with wafer delay constraints and process time variation
Y Lim, TS Yu, TE Lee
IEEE Transactions on Automation Science and Engineering 17 (1), 375-388, 2019
132019
Two-stage lot scheduling with waiting time constraints and due dates
TS Yu, HJ Kim, C Jung, TE Lee
2013 Winter Simulations Conference (WSC), 3630-3641, 2013
92013
Integrated scheduling of a dual-armed cluster tool for maximizing steady schedule patterns
W Kim, TS Yu, TE Lee
IEEE Transactions on Systems, Man, and Cybernetics: Systems 51 (12), 7282-7294, 2020
72020
Reachability tree-based optimization algorithm for cyclic scheduling of timed Petri nets
C Kim, TS Yu, TE Lee
IEEE Transactions on Automation Science and Engineering 18 (3), 1441-1452, 2020
62020
Feedback control of cluster tools: Stability against random time disruptions
C Kim, TS Yu, TE Lee
IEEE Transactions on Automation Science and Engineering 19 (3), 2008-2015, 2021
42021
Cleaning plan optimization for dual-armed cluster tools with general chamber cleaning periods
TG Lee, TS Yu, TE Lee
IEEE Transactions on Automation Science and Engineering, 2022
32022
Optimization for robot operations in cluster tools for concurrent manufacturing of multiple wafer types
TS Yu, JH Lee, SG Ko
Journal of Industrial Technology 43 (1), 49-55, 2023
2023
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학술자료 1–17