| Fabrication of anti-reflective structures using hot embossing with a stainless steel template irradiated by femtosecond laser TF Yao, PH Wu, TM Wu, CW Cheng, SY Yang Microelectronic engineering 88 (9), 2908-2912, 2011 | 45 | 2011 |
| In-line metrology of nanoscale features in semiconductor manufacturing systems TF Yao, A Duenner, M Cullinan Precision Engineering 47, 147-157, 2017 | 44 | 2017 |
| In-line dimensional metrology in nanomanufacturing systems enabled by a passive semiconductor wafer alignment mechanism TF Yao, A Duenner, M Cullinan Journal of Micro-and Nano-Manufacturing 5 (1), 011001, 2017 | 16 | 2017 |
| A tip-based metrology framework for real-time process feedback of roll-to-roll fabricated nanopatterned structures LG Connolly, TF Yao, A Chang, M Cullinan Precision Engineering 57, 137-148, 2019 | 15 | 2019 |
| Expanded area metrology for tip-based wafer inspection in the nanomanufacturing of electronic devices TF Yao, LG Connolly, M Cullinan Journal of Micro/Nanolithography, MEMS, and MOEMS 18 (3), 034003-034003, 2019 | 13 | 2019 |
| In-line, wafer-scale inspection in nano-fabrication systems TF Yao, A Duenner, MA Cullinan ASPE 2015 annual meeting, 2015 | 6 | 2015 |
| CO2-assisted thermal fusion bonding of heterogeneous materials by use of surface nano-pillars TF Yao, SY Yang Microsystem technologies 19, 151-157, 2013 | 5 | 2013 |
| Quick approach mechanism for tip-based in-line nanometrology systems TF Yao, A Duenner, M Cullinan Proceedings-ASPE 2016 Annual Meeting, 121-125, 2016 | 2 | 2016 |
| Metrology devices and methods for independently controlling a plurality of sensing probes M Cullinan, YAO Tsung-Fu US Patent App. 15/773,371, 2018 | 1 | 2018 |
| A low-cost, automated wafer loading system with submicron alignment accuracy for nanomanufacturing and nanometrology applications A Duenner, TF Yao, B De Hoyos, M Gonzales, N Riojas, M Cullinan Journal of Micro-and Nano-Manufacturing 4 (4), 041006, 2016 | 1 | 2016 |
| Metrology devices for rapid specimen setup M Cullinan, YAO Tsung-Fu, A Duenner US Patent 10,712,364, 2020 | | 2020 |
| High-Throughput, Tip-Based In-Line Nanometrology in Semiconductor and Nano-Featured Manufacturing TF Yao The University of Texas at Austin, 2018 | | 2018 |
| In-Line Dimensional Metrology for Nanomanufacturing Systems TF Yao, A Duenner, M Cullinan International Manufacturing Science and Engineering Conference 49897 …, 2016 | | 2016 |
| Large Area Inspection using a Multi-point, Tip-Based Nanometrology System TF Yao, M Cullinan | | |
