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Arnaud CLAUDEL
Arnaud CLAUDEL
Institut Néel - CNRS
Adresse e-mail validée de neel.cnrs.fr
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Effects of AlN nucleation layers on the growth of AlN films using high temperature hydride vapor phase epitaxy
M Balaji, A Claudel, V Fellmann, I Gélard, E Blanquet, R Boichot, A Pierret, ...
Journal of Alloys and Compounds 526, 103-109, 2012
462012
Thermodynamic and experimental investigations on the growth of thick aluminum nitride layers by high temperature CVD
A Claudel, E Blanquet, D Chaussende, M Audier, D Pique, M Pons
Journal of Crystal Growth 311 (13), 3371-3379, 2009
442009
Epitaxial and polycrystalline growth of AlN by high temperature CVD: Experimental results and simulation
R Boichot, A Claudel, N Baccar, A Milet, E Blanquet, M Pons
Surface and coatings technology 205 (5), 1294-1301, 2010
412010
Role of the chemical composition and structure on the electrical properties of a solid state electrolyte: Case of a highly conductive LiPON
L Le Van-Jodin, A Claudel, C Secouard, F Sabary, JP Barnes, S Martin
Electrochimica Acta 259, 742-751, 2018
402018
High temperature chemical vapor deposition of aluminum nitride, growth and evaluation
M Pons, R Boichot, N Coudurier, A Claudel, E Blanquet, S Lay, F Mercier, ...
Surface and Coatings Technology 230, 111-118, 2013
362013
Influence of the V/III ratio in the gas phase on thin epitaxial AlN layers grown on (0001) sapphire by high temperature hydride vapor phase epitaxy
A Claudel, V Fellmann, I Gélard, N Coudurier, D Sauvage, M Balaji, ...
Thin Solid Films 573, 140-147, 2014
322014
Epitaxial growth of AlN on c-plane sapphire by High Temperature Hydride Vapor Phase Epitaxy: Influence of the gas phase N/Al ratio and low temperature protective layer
R Boichot, N Coudurier, F Mercier, S Lay, A Crisci, S Coindeau, A Claudel, ...
Surface and Coatings Technology 237, 118-125, 2013
262013
Investigation on AlN epitaxial growth and related etching phenomenon at high temperature using high temperature chemical vapor deposition process
A Claudel, E Blanquet, D Chaussende, R Boichot, B Doisneau, ...
Journal of crystal growth 335 (1), 17-24, 2011
232011
Aluminum nitride homoepitaxial growth on polar and non‐polar AlN PVT substrates by high temperature CVD (HTCVD)
A Claudel, Y Chowanek, E Blanquet, D Chaussende, R Boichot, A Crisci, ...
physica status solidi c 8 (7‐8), 2019-2021, 2011
212011
CFD modeling of the high-temperature HVPE growth of aluminum nitride layers on c-plane sapphire: from theoretical chemistry to process evaluation
R Boichot, N Coudurier, F Mercier, A Claudel, N Baccar, A Milet, ...
Theoretical Chemistry Accounts 133, 1-13, 2014
172014
Effects of the V/III ratio on the quality of aluminum nitride grown on (0001) sapphire by high temperature hydride vapor phase epitaxy
N Coudurier, R Boichot, V Fellmann, A Claudel, E Blanquet, A Crisci, ...
physica status solidi c 10 (3), 362-365, 2013
122013
Growth and characterization of thick polycrystalline AlN layers by HTCVD
A Claudel, E Blanquet, D Chaussende, R Boichot, R Martin, H Mank, ...
Journal of The Electrochemical Society 158 (3), H328, 2011
92011
Solid electrolyte for a microbattery
L Le Van-Jodin, A Claudel, S Martin, C Secouard
US Patent 9,991,555, 2018
72018
Fabrication of a 4.4 GHz oscillator using SAW excited on epitaxial AlN grown on a Sapphire substrate
R Salut, G Martin, W Daniau, A Claudel, D Pique, S Ballandras
2013 IEEE International Ultrasonics Symposium (IUS), 267-270, 2013
52013
A multifunctional hybrid graphene and microfluidic platform to interface topological neuron networks
V Dupuit, O Terral, G Bres, A Claudel, B Fernandez, A Briançon‐Marjollet, ...
Advanced Functional Materials 32 (49), 2207001, 2022
42022
High temperature chemical vapor deposition of AlN/W1− xRex coatings on bulk SiC
FZ Roki, M Pons, F Mercier, R Boichot, C Bernard, E Blanquet, M Morais, ...
Surface and Coatings Technology 205 (5), 1302-1306, 2010
42010
Elaboration et caractérisation de couches de nitrure d'aluminium AlN par CVD haute température en chimie chlorée
A Claudel
Institut National Polytechnique de Grenoble-INPG, 2009
42009
High-speed growth and characterization of polycrystalline AlN layers by high temperature chemical vapor deposition (HTCVD)
A Claudel, E Blanquet, D Chaussende, R Martin, D Pique, M Pons
ECS Transactions 25 (8), 323, 2009
42009
Influence of total pressure and precursors flow rates on the growth of aluminium nitride by high temperature chemical vapor deposition (HTCVD)
A Claudel, E Blanquet, D Chaussende, D Pique, M Pons
physica status solidi c 6 (S2 2), S348-S351, 2009
42009
Growth of thick AlN layers by high temperature CVD (HTCVD)
A Claudel, E Blanquet, D Chaussende, M Audier, D Pique, M Pons
Materials Science Forum 600, 1269-1272, 2009
42009
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