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Konstantin Chirko
Konstantin Chirko
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Verified email at amat.com
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Cited by
Year
Ferroelectric plasma sources and their applications
YE Krasik, K Chirko, A Dunaevsky, JZ Gleizer, A Krokhmal, A Sayapin, ...
IEEE transactions on plasma science 31 (1), 49-59, 2003
452003
Spectroscopy of a ferroelectric plasma cathode
A Dunaevsky, K Chirko, YE Krasik, J Felsteiner, V Bershtam
Journal of Applied Physics 90 (8), 4108-4114, 2001
452001
Electron-beam induced photoresist shrinkage influence on 2D profiles
B Bunday, A Cordes, J Allgair, DB Aguilar, V Tileli, B Thiel, Y Avitan, ...
Metrology, Inspection, and Process Control for Microlithography XXIV 7638 …, 2010
342010
Enhanced emission mode of a ferroelectric plasma cathode
K Chirko, YE Krasik, J Felsteiner, A Sternlieb
Journal of applied physics 92 (10), 5691-5697, 2002
312002
Characterization of a channel spark discharge and the generated electron beam
YE Krasik, S Gleizer, K Chirko, JZ Gleizer, J Felsteiner, V Bernshtam, ...
Journal of applied physics 99 (6), 2006
262006
Parameters of the plasma produced at the surface of a ferroelectric cathode by different driving pulses
O Peleg, K Chirko, V Gurovich, J Felsteiner, YE Krasik, V Bernshtam
Journal of applied physics 97 (11), 2005
262005
Dense plasma formation on the surface of a ferroelectric induced by a driving pulse with a fast fall time
K Chirko, YE Krasik, A Sayapin, J Felsteiner, V Bernshtam
Journal of applied physics 94 (3), 1420-1427, 2003
162003
Application of a ferroelectric plasma cathode as a high-current switch
YE Krasik, K Chirko, JZ Gleizer, A Krokhmal, A Dunaevsky, J Felsteiner
The European Physical Journal D-Atomic, Molecular, Optical and Plasma …, 2002
162002
High-current electron sources based on gaseous discharges
YE Krasik, JZ Gleizer, A Krokhmal, K Chirko, A Sayapin, J Felsteiner, ...
Vacuum 77 (4), 391-398, 2005
152005
High-frequency electron beam modulation by a ferroelectric cathode with anomalous plasma resistance
K Chirko, VT Gurovich, YE Krasik, O Peleg, J Felsteiner, V Bernshtam
Physics of Plasmas 11 (8), 3865-3876, 2004
132004
Electron beam generation in a diode with different ferroelectric cathodes
YE Krasik, K Chirko, A Sayapin, J Gleizer, A Krokhmal, J Felsteiner
Journal of applied physics 94 (8), 5158-5162, 2003
112003
Electron beam generation in a diode having a ferroelectric plasma cathode controlled by optic fibers
JZ Gleizer, K Chirko, D Yarmolich, S Efimov, YE Krasik
The European Physical Journal-Applied Physics 34 (1), 35-41, 2006
102006
Ion beam generation in a diode with a ferroelectric anode
K Chirko, YE Krasik, J Felsteiner
Journal of applied physics 91 (12), 9487-9493, 2002
82002
Krasik Ya. E., and Felsteiner J
K Chirko, A Sayapin
J. Appl. Phys 91, 9487-9494, 2002
82002
Dense plasma formation on the surface of a ferroelectric cathode
K Chirko, YE Krasik, A Sayapin, J Felsteiner
Vacuum 77 (4), 385-390, 2005
72005
Passive and active plasma emission sources for high-current electron beam generation
YE Krasik, JZ Gleizer, D Yarmolich, V Vekselman, Y Hadas, A Krokhmal, ...
IEEJ Transactions on Fundamentals and Materials 127 (11), 697-703, 2007
62007
Investigation of a density modulated electron beam emitted by a ferroelectric plasma cathode
K Chirko, YE Krasik, A Dunaevsky, J Felsteiner
Journal of applied physics 91 (5), 3369-3376, 2002
52002
Filling empty structures with deposition under high-energy SEM for uniform DE layering
A Litman, K Chirko, Y Zur
US Patent 10,903,044, 2021
42021
High-frequency electron beam modulation, transportation and its interaction with slow-wave structure
K Chirko, YE Krasik, A Dunaevsky, J Felsteiner
PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International …, 2001
42001
Development and evaluation of three-dimensional metrology of nanopatterns using electron microscopy
N Shomrat, K Chirko, I Weisbord, Y Avniel, S Khristo, D Nessim, A Litman, ...
Journal of Micro/Nanopatterning, Materials, and Metrology 21 (2), 021202-021202, 2022
32022
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