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Felix Koch
Felix Koch
Carl Zeiss Jena GmbH/Microstructured Optics
Bestätigte E-Mail-Adresse bei zeiss.com
Titel
Zitiert von
Zitiert von
Jahr
Manufacturing of highly-dispersive, high-efficiency transmission gratings by laser interference lithography and dry etching
F Koch, D Lehr, O Schönbrodt, T Glaser, R Fechner, F Frost
Microelectronic Engineering 191, 60-65, 2018
232018
Stability requirements for two-beam interference lithography diffraction grating manufacturing
F Koch, D Lehr, T Glaser
Optifab 2017 10448, 329-343, 2017
102017
Reactive ion beam etching of highly dispersive, high-efficiency transmission gratings for the VIS range
A Finzel, F Koch, G Dornberg, D Lehr, F Frost, T Glaser
Optical Engineering 58 (9), 092614-092614, 2019
72019
Semi-analytic modeling of diffraction grating BRDF using scalar Fourier optics
F Koch, M Zilk, T Glaser
Modeling Aspects in Optical Metrology VIII 11783, 1178304, 2021
42021
High-resolution Czerny-Turner scatterometer for BRDF measurements
F Koch, M Zilk, M Schnabel, T Glaser
Optical Measurement Systems for Industrial Inspection XI 11056, 359-370, 2019
32019
Optical gratings with low wavefront aberrations and low straylight for enhanced spectroscopical applications
T Diehl, P Triebel, T Moeller, A Gatto, D Lehr, A Pesch, LH Erdmann, ...
Optical Fabrication, Testing, and Metrology VI 10692, 120-128, 2018
22018
Optimization and tolerancing of highly dispersive multilayer gratings for laser applications
F Koch, D Lehr, T Glaser
Computational Optics II 10694, 8-18, 2018
22018
Enhanced resolution light scattering analyzer for curved gratings–ELSA/CG-S
M Zilk, T Glaser, F Koch, M Steglich, T Wollweber, D Lehr, D Tomuta, ...
International Conference on Space Optics—ICSO 2022 12777, 521-537, 2023
2023
Tailored dispersive elements for adapted spectrometric sensing
T Diehl, P Triebel, T Moeller, A Gatto, D Lehr, A Pesch, LH Erdmann, ...
International Conference on Space Optics—ICSO 2018 11180, 577-584, 2019
2019
Methoden zur Charakterisierung optischer Gitter über einen großen Ortsfrequenzbereich
F Koch, M Burkhardt, M Schnabel, T Glaser, S Sinzinger
DGaO-Proceedings 120, 0
Optimization and manufacturing of gold gratings for pulse compression
F Koch, O Schönbrodt, M Burkhardt, D Lehr, T Glaser, S Sinzinger
DGaO-Proceedings 119, 0
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