Manufacturing of highly-dispersive, high-efficiency transmission gratings by laser interference lithography and dry etching F Koch, D Lehr, O Schönbrodt, T Glaser, R Fechner, F Frost Microelectronic Engineering 191, 60-65, 2018 | 23 | 2018 |
Stability requirements for two-beam interference lithography diffraction grating manufacturing F Koch, D Lehr, T Glaser Optifab 2017 10448, 329-343, 2017 | 10 | 2017 |
Reactive ion beam etching of highly dispersive, high-efficiency transmission gratings for the VIS range A Finzel, F Koch, G Dornberg, D Lehr, F Frost, T Glaser Optical Engineering 58 (9), 092614-092614, 2019 | 7 | 2019 |
Semi-analytic modeling of diffraction grating BRDF using scalar Fourier optics F Koch, M Zilk, T Glaser Modeling Aspects in Optical Metrology VIII 11783, 1178304, 2021 | 4 | 2021 |
High-resolution Czerny-Turner scatterometer for BRDF measurements F Koch, M Zilk, M Schnabel, T Glaser Optical Measurement Systems for Industrial Inspection XI 11056, 359-370, 2019 | 3 | 2019 |
Optical gratings with low wavefront aberrations and low straylight for enhanced spectroscopical applications T Diehl, P Triebel, T Moeller, A Gatto, D Lehr, A Pesch, LH Erdmann, ... Optical Fabrication, Testing, and Metrology VI 10692, 120-128, 2018 | 2 | 2018 |
Optimization and tolerancing of highly dispersive multilayer gratings for laser applications F Koch, D Lehr, T Glaser Computational Optics II 10694, 8-18, 2018 | 2 | 2018 |
Enhanced resolution light scattering analyzer for curved gratings–ELSA/CG-S M Zilk, T Glaser, F Koch, M Steglich, T Wollweber, D Lehr, D Tomuta, ... International Conference on Space Optics—ICSO 2022 12777, 521-537, 2023 | | 2023 |
Tailored dispersive elements for adapted spectrometric sensing T Diehl, P Triebel, T Moeller, A Gatto, D Lehr, A Pesch, LH Erdmann, ... International Conference on Space Optics—ICSO 2018 11180, 577-584, 2019 | | 2019 |
Methoden zur Charakterisierung optischer Gitter über einen großen Ortsfrequenzbereich F Koch, M Burkhardt, M Schnabel, T Glaser, S Sinzinger DGaO-Proceedings 120, 0 | | |
Optimization and manufacturing of gold gratings for pulse compression F Koch, O Schönbrodt, M Burkhardt, D Lehr, T Glaser, S Sinzinger DGaO-Proceedings 119, 0 | | |