| Micromachined inertial sensors N Yazdi, F Ayazi, K Najafi Proceedings of the IEEE 86 (8), 1640-1659, 1998 | 2740 | 1998 |
| A HARPSS polysilicon vibrating ring gyroscope F Ayazi, K Najafi Journal of microelectromechanical systems 10 (2), 169-179, 2001 | 519 | 2001 |
| An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations Z Hao, A Erbil, F Ayazi Sensors and Actuators A: Physical 109 (1-2), 156-164, 2003 | 510 | 2003 |
| Process and temperature compensation in a 7-MHz CMOS clock oscillator K Sundaresan, PE Allen, F Ayazi IEEE Journal of solid-state circuits 41 (2), 433-442, 2006 | 307 | 2006 |
| Thin-film piezoelectric-on-silicon resonators for high-frequency reference oscillator applications R Abdolvand, HM Lavasani, GK Ho, F Ayazi IEEE transactions on ultrasonics, ferroelectrics, and frequency control 55 …, 2008 | 250 | 2008 |
| High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps S Pourkamali, A Hashimura, R Abdolvand, GK Ho, A Erbil, F Ayazi Journal of Microelectromechanical Systems 12 (4), 487-496, 2003 | 245 | 2003 |
| High aspect-ratio combined poly and single-crystal silicon (HARPSS) MEMS technology F Ayazi, K Najafi Journal of Microelectromechanical Systems 9 (3), 288-294, 2000 | 242 | 2000 |
| A 2.5-V 14-bit/spl Sigma//spl Delta/CMOS SOI capacitive accelerometer BV Amini, F Ayazi IEEE Journal of Solid-State Circuits 39 (12), 2467-2476, 2004 | 229 | 2004 |
| Effect of phonon interactions on limiting the fQ product of micromechanical resonators R Tabrizian, M Rais-Zadeh, F Ayazi TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009 | 226 | 2009 |
| Piezoelectric-on-silicon lateral bulk acoustic wave micromechanical resonators GK Ho, R Abdolvand, A Sivapurapu, S Humad, F Ayazi Journal of microelectromechanical systems 17 (2), 512-520, 2008 | 226 | 2008 |
| A mode-matched silicon-yaw tuning-fork gyroscope with subdegree-per-hour Allan deviation bias instability MF Zaman, A Sharma, Z Hao, F Ayazi Journal of Microelectromechanical systems 17 (6), 1526-1536, 2008 | 200 | 2008 |
| An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon R Abdolvand, F Ayazi Sensors and Actuators A: Physical 144 (1), 109-116, 2008 | 180 | 2008 |
| A Sub-0.2hr Bias Drift Micromechanical Silicon Gyroscope With Automatic CMOS Mode-Matching A Sharma, MF Zaman, F Ayazi IEEE Journal of Solid-State Circuits 44 (5), 1593-1608, 2009 | 176 | 2009 |
| A 4.5-mW Closed-Loop Micro-Gravity CMOS SOI Accelerometer BV Amini, R Abdolvand, F Ayazi IEEE Journal of Solid-State Circuits 41 (12), 2983-2991, 2006 | 169 | 2006 |
| Piezoelectric on semiconductor-on-insulator microelectromechanical resonators F Ayazi, G Piazza, R Abdolvand, GK Ho, S Humad US Patent 6,909,221, 2005 | 165 | 2005 |
| VHF single crystal silicon capacitive elliptic bulk-mode disk resonators-part II: implementation and characterization S Pourkamali, Z Hao, F Ayazi Journal of Microelectromechanical Systems 13 (6), 1054-1062, 2004 | 164 | 2004 |
| Sub-micro-gravity in-plane accelerometers with reduced capacitive gaps and extra seismic mass R Abdolvand, BV Amini, F Ayazi Journal of microelectromechanical systems 16 (5), 1036-1043, 2007 | 157 | 2007 |
| Design and fabrication of high-performance polysilicon vibrating ring gyroscope F Ayazi, K Najafi Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro …, 1998 | 156 | 1998 |
| A 104-dB dynamic range transimpedance-based CMOS ASIC for tuning fork microgyroscopes A Sharma, MF Zaman, F Ayazi IEEE Journal of Solid-State Circuits 42 (8), 1790-1802, 2007 | 153 | 2007 |
| Electronically temperature compensated silicon bulk acoustic resonator reference oscillators K Sundaresan, GK Ho, S Pourkamali, F Ayazi IEEE Journal of Solid-State Circuits 42 (6), 1425-1434, 2007 | 149 | 2007 |
