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Eloi Marigó Ferrer
Eloi Marigó Ferrer
Verified email at uab.cat
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Cited by
Year
Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories
A Uranga, J Verd, E Marigó, J Giner, JL Muñóz-Gamarra, N Barniol
Sensors and Actuators A: Physical 197, 88-95, 2013
712013
Integration of NEMS resonators in a 65 nm CMOS technology
JL Muñoz-Gamarra, P Alcaine, E Marigó, J Giner, A Uranga, J Esteve, ...
Microelectronic Engineering 110, 246-249, 2013
362013
Zero-level packaging of MEMS in standard CMOS technology
E Marigó, JL Lopez, G Murillo, F Torres, J Giner, A Uranga, G Abadal, ...
Journal of Micromechanics and Microengineering 20 (6), 064009, 2010
192010
Fully CMOS integrated bandpass filter based on mechanical coupling of two RF MEMS resonators
J Giner, A Uranga, F Torres, E Marigo, N Barniol
Electronics letters 46 (9), 640, 2010
182010
Monolithical AlN PMUT on pre-processed CMOS substrate
J Mufioz, F Torres, A Uranga, V Tsanov, N Bamiol, E Marigó, ...
2018 IEEE International Frequency Control Symposium (IFCS), 1-3, 2018
162018
A fully integrated programmable dual-band RF filter based on electrically and mechanically coupled CMOS-MEMS resonators
J Giner, A Uranga, JL Muñóz-Gamarra, E Marigó, N Barniol
Journal of Micromechanics and Microengineering 22 (5), 055020, 2012
162012
Design of a MEMS-Based oscillator using 180nm CMOS technology
S Roy, H Ramiah, AW Reza, CC Lim, EM Ferrer
PloS one 11 (7), e0158954, 2016
152016
VHF band-pass filter based on a single CMOS-MEMS doubleended tuning fork resonator
JL Lopez, J Verd, A Uranga, G Murillo, J Giner, E Marigó, F Torres, ...
Procedia Chemistry 1 (1), 1131-1134, 2009
152009
AlN piezoelectric micromachined ultrasonic transducer array monolithically fabricated on top of pre-processed CMOS substrates
E Ledesma, I Zamora, F Torres, A Uranga, V Tzanov, N Barniol, E Marigo, ...
2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019
132019
Squared PMUT with enhanced pressure sensitivities
E Ledesma, I Zamora, F Torres, A Uranga, V Tzanov, N Barniol, E Marigó, ...
Proceedings 2 (13), 925, 2018
132018
Estimation of SAW velocity and coupling coefficient in multilayered piezo-substrates AlN/SiO2/Si
AF Malik, V Jeoti, M Fawzy, A Iqbal, Z Aslam, MS Pandian, E Marigo
2016 6th International Conference on Intelligent and Advanced Systems (ICIAS …, 2016
132016
Fabrication and measurement of a suspended nanochannel microbridge resonator monolithically integrated with CMOS readout circuitry
G Vidal-Álvarez, E Marigó, F Torres, N Barniol
Micromachines 7 (3), 40, 2016
132016
Packaged CMOS–MEMS free–free beam oscillator
E Marigó, J Verd, JL López, A Uranga, N Barniol
Journal of Micromechanics and Microengineering 23 (11), 115018, 2013
132013
Monolithically integrated double-ended tuning fork-based oscillator with low bias voltage in air conditions
JL Lopez, J Verd, E Marigó, A Uranga, G Murillo, J Giner, F Torres, ...
Procedia Chemistry 1 (1), 614-617, 2009
132009
Thin film piezoelectric devices integrated on CMOS
MS Pandian, EM Ferrer, WS Tay, V Madhaven, AK Kantimahanti, ...
2016 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications …, 2016
122016
Dual-clock with single and monolithical 0-level vacuum packaged MEMS-on-CMOS resonator
A Uranga, G Sobreviela, N Barniol, E Marigo, C Tay-Wee-Song, ...
2015 28th IEEE International Conference on Micro Electro Mechanical Systems …, 2015
122015
High Q CMOS-MEMS resonators and its applications as RF tunable band-pass filters
JL López, J Verd, J Giner, A Uranga, G Murillo, E Marigo, F Torres, ...
TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009
122009
Monolithic BAW oscillator with conventional QFN packaging
E Marigó, M Soundara-Pandian, J Bin, J Din, NSB Roslan, A Fawzy, ...
2019 Joint Conference of the IEEE International Frequency Control Symposium …, 2019
112019
Mid-air haptic feedback enabled by aluminum nitride PMUTs
M Billen, EM Ferrer, MS Pandian, X Rottenberg, V Rochus
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems …, 2022
102022
Cancellation of the parasitic feedthrough current in an integrated CMOS–MEMS clamped-clamped beam resonator
J Giner, A Uranga, E Marigò, JL Muñoz-Gamarra, E Colinet, N Barniol, ...
Microelectronic engineering 98, 599-602, 2012
102012
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