| Diffusion model of hologram formation in dry photopolymer materials G Zhao, P Mouroulis Journal of Modern Optics 41 (10), 1929-1939, 1994 | 439 | 1994 |
| Stabilizing a substrate using a vacuum preload air bearing chuck G Zhao, A Belyaev, CH Wolters, PA Doyle, HW Dando, M Vaez-Iravani US Patent 7,607,647, 2009 | 299 | 2009 |
| Sample inspection system M Vaez-Iravani, S Stokowski, G Zhao US Patent 6,201,601, 2001 | 248 | 2001 |
| System for detecting anomalies and/or features of a surface G Zhao, S Stokowski, M Vaez-Iravani US Patent 6,608,676, 2003 | 119 | 2003 |
| Surface inspection system using laser line illumination with two dimensional imaging JK Leong, G Zhao, M Vaez-Iravani US Patent 7,525,649, 2009 | 109 | 2009 |
| Optical system for measuring samples using short wavelength radiation M Nikoonahad, S Lee, H Kwak, S Edelstein, G Zhao, G Janik US Patent 7,369,233, 2008 | 100 | 2008 |
| In-situ metalization monitoring using eddy current and optical measurements KR Lehman, SM Lee, WH Johnson III, J Fielden, G Zhao, M Nikoonahad US Patent 6,707,540, 2004 | 100 | 2004 |
| Wafer inspection A Romanovsky, I Maleev, D Kavaldjiev, Y Yuditsky, D Woll, S Biellak, ... US Patent 9,279,774, 2016 | 98 | 2016 |
| Systems and methods for inspection of specimen surfaces M Nikoonahad, G Zhao, K Kele US Patent App. 10/345,055, 2004 | 75 | 2004 |
| Metrology system using optical phase M Nikoonahad, G Zhao, I Smith, M Vaez-Iravani US Patent 6,710,876, 2004 | 67 | 2004 |
| Sample inspection system M Vaez-Iravani, S Stokowski, G Zhao US Patent 6,639,662, 2003 | 64 | 2003 |
| Wafer inspection G Zhao, JK Leong, M Vaez-Iravani US Patent 8,891,079, 2014 | 57 | 2014 |
| Systems for measuring periodic structures G Zhao, KP Gross, R Smedt, M Nikoonahad US Patent 6,721,052, 2004 | 52 | 2004 |
| Second order grating formation in dry holographic photopolymers G Zhao, P Mouroulis Optics communications 115 (5-6), 528-532, 1995 | 52 | 1995 |
| System for detecting anomalies and/or features of a surface M Vaez-Iravani, G Zhao, SE Stokowski US Patent 7,088,443, 2006 | 51 | 2006 |
| Method and system using exposure control to inspect a surface JK Leong, G Zhao, M Vaez-Iravani US Patent 6,724,473, 2004 | 49 | 2004 |
| TDI sensor in a darkfield system J Vazhaeparambil, G Zhao, D Kavaldjiev, A Romanovsky, I Maleev, ... US Patent 9,891,177, 2018 | 46 | 2018 |
| Sample inspection system M Vaez-Iravani, S Stokowski, G Zhao US Patent 6,384,910, 2002 | 45 | 2002 |
| Defect Detection and Response G Zhao, GH Zapalac Jr, SSH Ngai, M Vaez-Iravani, A Levy, ... US Patent App. 12/336,704, 2010 | 44 | 2010 |
| System for scatterometric measurements and applications A Fabrikant, G Zhao, DC Wack, M Nikoonahad US Patent 7,099,005, 2006 | 38 | 2006 |
