A pneumatically actuated micro valve with a silicone rubber membrane for integration with fluid-handling systems C Vicider, O Ohman, H Elderstig Proceedings of the International Solid-State Sensors and Actuators …, 1995 | 176 | 1995 |
Fabrication of 45/spl deg/mirrors together with well-defined v-grooves using wet anisotropic etching of silicon C Strandman, L Rosengren, HGA Elderstig, Y Backlund Journal of microelectromechanical systems 4 (4), 213-219, 1995 | 151 | 1995 |
Method of producing cavity structures H Elderstig US Patent 5,690,841, 1997 | 106 | 1997 |
A novel fabrication method of capillary tubes on quartz for chemical analysis applications W Kaplan, H Elderstig, C Veider Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro …, 1994 | 42 | 1994 |
24-GHz modulation bandwidth and passive alignment of flip-chip mounted DFB laser diodes S Lindgren, H Ahlfeldt, L Backlin, L Forssén, C Vieider, H Elderstig, ... IEEE Photonics Technology Letters 9 (3), 306-308, 1997 | 33 | 1997 |
Angled opto-mechanical device O Steijer, C Moll, B Lindström, C Vieider, P Eriksen, JÅ Engstrand, ... US Patent 6,402,389, 2002 | 29 | 2002 |
Spin deposition of polymers over holes and cavities H Elderstig, P Wallgren Sensors and Actuators A: Physical 46 (1-3), 95-97, 1995 | 15 | 1995 |
Method and device for waveguide connection H Elderstig, O Larsson, G Palmskog, O Ohman US Patent 5,984,534, 1999 | 13 | 1999 |
Polymeric MST-high precision at low cost H Elderstig, O Larsson Journal of Micromechanics and Microengineering 7 (3), 89, 1997 | 13 | 1997 |
A fluorescence detection and selection device for DNA-molecules bound to microspheres J Holm, H Elderstig, O Kristensen, R Rigler Nucleosides and Nucleotides 16 (5-6), 557-562, 1997 | 10 | 1997 |
Opto-mechanical device O Steijer, C Moll, B Lindström, C Vieider, P Eriksen, JÅ Engstrand, ... US Patent 6,173,098, 2001 | 9 | 2001 |
Method and arrangement for coupling a wave guide to a component L Backlin, Y Backlund, H Elderstig, S Lindgren, O Steijer US Patent 5,774,609, 1998 | 9 | 1998 |
A new process for combining anisotropic bulk etching with subsequent precision lithography C Vieider, J Holm, L Forssen, H Elderstig, S Lindgren, H Ahlfeldt Proceedings of International Solid State Sensors and Actuators Conference …, 1997 | 8 | 1997 |
Integration of an Amperometric Glucose Sensor in a µ-TAS L Forssen, H Elderstig, L Eng, M Nordling Micro Total Analysis Systems: Proceedings of the μTAS’94 Workshop, held at …, 1995 | 5 | 1995 |
Unitary, double-ended connector for optical fibres H Elderstig, C Vieider US Patent 5,550,943, 1996 | 3 | 1996 |
A mechanical splice for fiber ribbons H Elderstig, C Vieider, B Lindstrom Proceedings of the International Solid-State Sensors and Actuators …, 1995 | 3 | 1995 |
Silicone as an optical material H Elderstig, G Arvidsson, L Forss, P Henriksson, F Laurell, G Palmskog, ... 4th International Conference on Micro System Technologies, Micro System …, 1994 | 3 | 1994 |
An R&D; programme on alternative technologies for the ATLAS level-1 calorimeter trigger G Appelquist, X Zhao, H Elderstig, S Lindgren, C Svensson, N Yamdagni, ... CERN-ATL-DAQ-95-032, 1995 | 2 | 1995 |
A fine pattern GTO thyristor fabricated using a self-aligned process M Bakowski, U Gustafsson, H Elderstig, W Kaplan, P Norlin, U Wennström Physica Scripta 1994 (T54), 42, 1994 | | 1994 |
Connection device for optical fibres H ELDERSTIG, C Vieider | | 1993 |