| Regression Methods for Virtual Metrology of Layer Thickness in Chemical Vapor Deposition H Purwins, B Barak, A Nagi, R Engel, U Höckele, A Kyek, S Cherla, ... | 61* | |
| Data mining and support vector regression machine learning in semiconductor manufacturing to improve virtual metrology B Lenz, B Barak 2013 46th Hawaii International Conference on System Sciences, 3447-3456, 2013 | 47 | 2013 |
| Regression methods for prediction of PECVD Silicon Nitride layer thickness H Purwins, A Nagi, B Barak, U Höckele, A Kyek, B Lenz, G Pfeifer, ... 2011 IEEE International Conference on Automation Science and Engineering …, 2011 | 25 | 2011 |
| Virtual metrology in semiconductor manufacturing by means of predictive machine learning models B Lenz, B Barak, J Mührwald, C Leicht 2013 12th international conference on machine learning and applications 2 …, 2013 | 20 | 2013 |
| Framework for integration of virtual metrology and predictive maintenance G Roeder, A Mattes, M Pfeffer, M Schellenberger, L Pfitzner, A Knapp, ... 2012 SEMI Advanced Semiconductor Manufacturing Conference, 288-293, 2012 | 10 | 2012 |
| Development of smart feature selection for advanced virtual metrology B Lenz, B Barak, C Leicht 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014 …, 2014 | 7 | 2014 |
| Smart feature selection to enable advanced virtual metrology B Lenz Universität Tübingen, 2015 | 2 | 2015 |
| Analyse und Optimierung von Algorithmen des Maschinellen Lernens in der Virtuellen Messtechnik C Leicht, B Lenz, M Wagner University Leipzig, Diploma Thesis, 2013 | 2 | 2013 |
| Developing a framework for virtual metrology and predictive maintenance M Schellenberger, G Roeder, A Mattes, M Pfeffer, L Pfitzner, A Knapp, ... | 2 | 2011 |
| Generic Data Mining System in Semiconductor Manufacturing B Lenz, B. and Barak IEEE 12th International Conference on Data Mining (ICDM), 2012 | | 2012 |
| Integration of the IMPROVE framework at Infineon Technologies AG A Lenz, B. and Barak, B. and Kyek Advanced Process Control and Manufacturing Conference (APCM), 2012 | | 2012 |
| Data Mining and Machine Learning Technique in Semiconductor Manufacturing Processes (PECVD) H Lenz, B. and Barak, B. and Kyek, A. and Purwins International SEMATECH Manufacturing Initiative (ISMI), 2011 | | 2011 |
