Kinetic theory of toroidicity‐induced Alfvén eigenmodes RR Mett, SM Mahajan Physics of Fluids B: Plasma Physics 4 (9), 2885-2893, 1992 | 284 | 1992 |
Kinetic theory of toroidicity‐induced Alfvén eigenmodes RR Mett, SM Mahajan Physics of Fluids B: Plasma Physics 4 (9), 2885-2893, 1992 | 284 | 1992 |
Method and apparatus for supplying a chucking voltage to an electrostatic chuck within a semiconductor wafer processing system M Dahimene, RR Mett, S Salimian US Patent 6,198,616, 2001 | 205 | 2001 |
Arbitrary mode number boundary‐layer theory for nonideal toroidal Alfvén modes HL Berk, RR Mett, DM Lindberg Physics of Fluids B: Plasma Physics 5 (11), 3969-3996, 1993 | 95 | 1993 |
Apparatus and method for controlling plasma uniformity in a semiconductor wafer processing system H Shan, C Bjorkman, P Luscher, R Mett, M Welch US Patent 6,232,236, 2001 | 82 | 2001 |
Current drive via magnetohydrodynamic helicity waves RR Mett, JA Tataronis Physical review letters 63 (13), 1380, 1989 | 75 | 1989 |
Distributed inductively-coupled plasma source and circuit for coupling induction coils to RF power supply BY Pu, H Shan, C Bjorkman, K Doan, M Welch, RR Mett US Patent 6,825,618, 2004 | 68 | 2004 |
Apparatus and method for actively controlling the DC potential of a cathode pedestal RR Mett, M Dahimene, PE Luscher, S Salimian, MS Contreras US Patent 5,737,177, 1998 | 65 | 1998 |
Distributed inductively-coupled plasma source and circuit for coupling induction coils to RF power supply BY Pu, H Shan, C Bjorkman, K Doan, M Welch, RR Mett US Patent 6,568,346, 2003 | 63 | 2003 |
Distributed inductively-coupled plasma source BY Pu, H Shan, C Bjorkman, K Doan, M Welch, RR Mett US Patent 6,273,022, 2001 | 58 | 2001 |
Dielectric microwave resonators in TE011 cavities for electron paramagnetic resonance spectroscopy RR Mett, JW Sidabras, IS Golovina, JS Hyde Review of scientific instruments 79 (9), 2008 | 52 | 2008 |
Axially uniform resonant cavity modes for potential use in electron paramagnetic resonance spectroscopy RR Mett, W Froncisz, JS Hyde Review of Scientific Instruments 72 (11), 4188-4200, 2001 | 49 | 2001 |
Multipurpose EPR loop-gap resonator and cylindrical TE011 cavity for aqueous samples at 94GHz JW Sidabras, RR Mett, W Froncisz, TG Camenisch, JR Anderson, ... Review of scientific instruments 78 (3), 2007 | 47 | 2007 |
Apparatus and method for controlling plasma uniformity in a semiconductor wafer processing system H Shan, C Bjorkman, P Luscher, R Mett, M Welch US Patent App. 09/797,212, 2001 | 43 | 2001 |
Impedance matching network RR Mett, RD Greenway, G Bilek, A Joshi US Patent 5,952,896, 1999 | 39 | 1999 |
Microwave leakage from field modulation slots in TE011 electron paramagnetic resonance cavities RR Mett, JS Hyde Review of scientific instruments 76 (1), 2005 | 33 | 2005 |
Cavities with axially uniform fields for use in electron paramagnetic resonance. II. Free space generalization JR Anderson, RR Mett, JS Hyde Review of scientific instruments 73 (8), 3027-3037, 2002 | 33 | 2002 |
Method and apparatus for minimizing plasma destabilization within a semiconductor wafer processing system R Mett, S Salimian US Patent 6,304,424, 2001 | 32 | 2001 |
Aqueous flat-cells perpendicular to the electric field for use in electron paramagnetic resonance spectroscopy, II: design JW Sidabras, RR Mett, JS Hyde Journal of Magnetic Resonance 172 (2), 333-341, 2005 | 31 | 2005 |
Magnetic field optimization in a dielectric magnetically enhanced reactive ion etch reactor to produce an instantaneously uniform plasma RA Lindley, CH Björkman, H Shan, KH Ke, K Doan, RR Mett, M Welch Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 16 (3 …, 1998 | 29 | 1998 |