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Richard Mett
Richard Mett
Professor, Milwaukee School of Engineering, Adjunct Professor, Medical College of Wisconsin
Verified email at msoe.edu - Homepage
Title
Cited by
Cited by
Year
Kinetic theory of toroidicity‐induced Alfvén eigenmodes
RR Mett, SM Mahajan
Physics of Fluids B: Plasma Physics 4 (9), 2885-2893, 1992
2841992
Kinetic theory of toroidicity‐induced Alfvén eigenmodes
RR Mett, SM Mahajan
Physics of Fluids B: Plasma Physics 4 (9), 2885-2893, 1992
2841992
Method and apparatus for supplying a chucking voltage to an electrostatic chuck within a semiconductor wafer processing system
M Dahimene, RR Mett, S Salimian
US Patent 6,198,616, 2001
2052001
Arbitrary mode number boundary‐layer theory for nonideal toroidal Alfvén modes
HL Berk, RR Mett, DM Lindberg
Physics of Fluids B: Plasma Physics 5 (11), 3969-3996, 1993
951993
Apparatus and method for controlling plasma uniformity in a semiconductor wafer processing system
H Shan, C Bjorkman, P Luscher, R Mett, M Welch
US Patent 6,232,236, 2001
822001
Current drive via magnetohydrodynamic helicity waves
RR Mett, JA Tataronis
Physical review letters 63 (13), 1380, 1989
751989
Distributed inductively-coupled plasma source and circuit for coupling induction coils to RF power supply
BY Pu, H Shan, C Bjorkman, K Doan, M Welch, RR Mett
US Patent 6,825,618, 2004
682004
Apparatus and method for actively controlling the DC potential of a cathode pedestal
RR Mett, M Dahimene, PE Luscher, S Salimian, MS Contreras
US Patent 5,737,177, 1998
651998
Distributed inductively-coupled plasma source and circuit for coupling induction coils to RF power supply
BY Pu, H Shan, C Bjorkman, K Doan, M Welch, RR Mett
US Patent 6,568,346, 2003
632003
Distributed inductively-coupled plasma source
BY Pu, H Shan, C Bjorkman, K Doan, M Welch, RR Mett
US Patent 6,273,022, 2001
582001
Dielectric microwave resonators in TE011 cavities for electron paramagnetic resonance spectroscopy
RR Mett, JW Sidabras, IS Golovina, JS Hyde
Review of scientific instruments 79 (9), 2008
522008
Axially uniform resonant cavity modes for potential use in electron paramagnetic resonance spectroscopy
RR Mett, W Froncisz, JS Hyde
Review of Scientific Instruments 72 (11), 4188-4200, 2001
492001
Multipurpose EPR loop-gap resonator and cylindrical TE011 cavity for aqueous samples at 94GHz
JW Sidabras, RR Mett, W Froncisz, TG Camenisch, JR Anderson, ...
Review of scientific instruments 78 (3), 2007
472007
Apparatus and method for controlling plasma uniformity in a semiconductor wafer processing system
H Shan, C Bjorkman, P Luscher, R Mett, M Welch
US Patent App. 09/797,212, 2001
432001
Impedance matching network
RR Mett, RD Greenway, G Bilek, A Joshi
US Patent 5,952,896, 1999
391999
Microwave leakage from field modulation slots in TE011 electron paramagnetic resonance cavities
RR Mett, JS Hyde
Review of scientific instruments 76 (1), 2005
332005
Cavities with axially uniform fields for use in electron paramagnetic resonance. II. Free space generalization
JR Anderson, RR Mett, JS Hyde
Review of scientific instruments 73 (8), 3027-3037, 2002
332002
Method and apparatus for minimizing plasma destabilization within a semiconductor wafer processing system
R Mett, S Salimian
US Patent 6,304,424, 2001
322001
Aqueous flat-cells perpendicular to the electric field for use in electron paramagnetic resonance spectroscopy, II: design
JW Sidabras, RR Mett, JS Hyde
Journal of Magnetic Resonance 172 (2), 333-341, 2005
312005
Magnetic field optimization in a dielectric magnetically enhanced reactive ion etch reactor to produce an instantaneously uniform plasma
RA Lindley, CH Björkman, H Shan, KH Ke, K Doan, RR Mett, M Welch
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 16 (3 …, 1998
291998
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