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Shigehisa Shibayama
Shigehisa Shibayama
名古屋大学大学院
Verified email at alice.xtal.nagoya-u.ac.jp
Title
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Cited by
Year
Evolution of ferroelectric HfO2 in ultrathin region down to 3 nm
X Tian, S Shibayama, T Nishimura, T Yajima, S Migita, A Toriumi
Applied Physics Letters 112 (10), 2018
2202018
Kinetic pathway of the ferroelectric phase formation in doped HfO2 films
L Xu, T Nishimura, S Shibayama, T Yajima, S Migita, A Toriumi
Journal of Applied Physics 122 (12), 2017
1912017
Ferroelectricity of nondoped thin HfO2 films in TiN/HfO2/TiN stacks
T Nishimura, L Xu, S Shibayama, T Yajima, S Migita, A Toriumi
Japanese journal of applied physics 55 (8S2), 08PB01, 2016
1072016
Ferroelectric phase stabilization of HfO2 by nitrogen doping
L Xu, T Nishimura, S Shibayama, T Yajima, S Migita, A Toriumi
Applied Physics Express 9 (9), 091501, 2016
1032016
Thermodynamic control of ferroelectric-phase formation in HfxZr1− xO2 and ZrO2
S Shibayama, T Nishimura, S Migita, A Toriumi
Journal of Applied Physics 124 (18), 2018
542018
Experimental observation of type-I energy band alignment in lattice-matched Ge1− x− ySixSny/Ge heterostructures
T Yamaha, S Shibayama, T Asano, K Kato, M Sakashita, W Takeuchi, ...
Applied Physics Letters 108 (6), 2016
332016
Density functional study for crystalline structures and electronic properties of Si1− xSnx binary alloys
Y Nagae, M Kurosawa, S Shibayama, M Araidai, M Sakashita, ...
Japanese Journal of Applied Physics 55 (8S2), 08PE04, 2016
262016
General relationship for cation and anion doping effects on ferroelectric HfO2 formation
L Xu, S Shibayama, K Izukashi, T Nishimura, T Yajima, S Migita, A Toriumi
2016 IEEE International Electron Devices Meeting (IEDM), 25.2. 1-25.2. 4, 2016
252016
Stabilized formation of tetragonal ZrO2 thin film with high permittivity
K Kato, T Saito, S Shibayama, M Sakashita, W Takeuchi, N Taoka, ...
Thin Solid Films 557, 192-196, 2014
252014
Improvement of Al2O3/Ge interfacial properties by O2-annealing
S Shibayama, K Kato, M Sakashita, W Takeuchi, O Nakatsuka, S Zaima
Thin Solid Films 520 (8), 3397-3401, 2012
242012
Impacts of AlGeO formation by post thermal oxidation of Al2O3/Ge structure on interfacial properties
S Shibayama, K Kato, M Sakashita, W Takeuchi, N Taoka, O Nakatsuka, ...
Thin Solid Films 557, 282-287, 2014
192014
Ferroelectric phase formation for undoped ZrO2 thin films by wet O2 annealing
S Shibayama, J Nagano, M Sakashita, O Nakatsuka
Japanese Journal of Applied Physics 59 (SM), SMMA04, 2020
162020
Interfacial reaction mechanisms in Al2O3/Ge structure by oxygen radical process
K Kato, S Shibayama, M Sakashita, W Takeuchi, N Taoka, O Nakatsuka, ...
Japanese Journal of Applied Physics 52 (4S), 04CA08, 2013
152013
Development of ONO-4538, fully human anti-PD-1 antibody for malignant tumors
S Shibayama, T Yoshida
Medical Science Digest 36 (12), 1120-1123, 0
14
Study of wake-up and fatigue properties in doped and undoped ferroelectric HfO2 in conjunction with piezo-response force microscopy analysis
S Shibayama, L Xu, S Migita, A Toriumi
2016 IEEE Symposium On Vlsi Technology, 1-2, 2016
122016
Understanding of interface structures and reaction mechanisms induced by Ge or GeO diffusion in Al2O3/Ge structure
S Shibayama, K Kato, M Sakashita, W Takeuchi, N Taoka, O Nakatsuka, ...
Applied Physics Letters 103 (8), 2013
122013
Growth of ultrahigh-Sn-content Ge1− xSnx epitaxial layer and its impact on controlling Schottky barrier height of metal/Ge contact
A Suzuki, O Nakatsuka, S Shibayama, M Sakashita, W Takeuchi, ...
Japanese Journal of Applied Physics 55 (4S), 04EB12, 2016
112016
Interface properties of Al2O3/Ge structures with thin Ge oxide interfacial layer formed by pulsed metal organic chemical vapor deposition
T Yoshida, K Kato, S Shibayama, M Sakashita, N Taoka, W Takeuchi, ...
Japanese Journal of Applied Physics 53 (8S1), 08LD03, 2014
112014
Sub-nm EOT ferroelectric HfO2 on p+Ge with highly reliable field cycling properties
X Tian, L Xu, S Shibayama, T Nishimura, T Yajima, S Migita, A Toriumi
2017 IEEE International Electron Devices Meeting (IEDM), 37.1. 1-37.1. 4, 2017
92017
Reduction of Schottky barrier height at metal/n-Ge interface by introducing an ultra-high Sn content Ge1− xSnx interlayer
A Suzuki, O Nakatsuka, S Shibayama, M Sakashita, W Takeuchi, ...
Applied Physics Letters 107 (21), 2015
92015
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