| Microwave-frequency effects on microplasma J Xue, JA Hopwood IEEE transactions on plasma science 37 (6), 816-822, 2009 | 56 | 2009 |
| Argon microplasma diagnostics by diode laser absorption N Miura, J Xue, JA Hopwood IEEE transactions on plasma science 38 (9), 2458-2464, 2010 | 24 | 2010 |
| Plasma resonances in a microwave-driven microdischarge J Xue, RS Urdahl, JE Cooley Applied Physics Letters 100 (6), 2012 | 15 | 2012 |
| Density of metastable atoms in the plume of a low-pressure argon microplasma J Xue, JE Cooley, RS Urdahl Journal of Physics D: Applied Physics 45 (36), 365201, 2012 | 14 | 2012 |
| Microplasma trapping of particles J Xue, JA Hopwood IEEE transactions on plasma science 35 (5), 1574-1579, 2007 | 14 | 2007 |
| Properties of microplasmas excited by microwaves for VUV photon sources JE Cooley, R Urdahl, J Xue, M Denning, P Tian, MJ Kushner Plasma Sources Science and Technology 24 (6), 065009, 2015 | 13 | 2015 |
| Dry Etch Processes J Xue, J Liu, Y Chen, T Michaelson, P Deaton, TW Weidman, CS Ngai US Patent App. 13/591,915, 2013 | 12 | 2013 |
| Post-litho line edge/width roughness smoothing by ion implantations TY Ma, P Xie, L Godet, PM Martin, C Campbell, J Xue, L Miao, Y Chen, ... Advances in Resist Materials and Processing Technology XXX 8682, 34-41, 2013 | 5 | 2013 |
| Development of high etch selective hardmask material by ion implantation into amorphous carbon films Pramit MANNA, Abhijit Basu Mallick, Ludovic Godet, Yongmei Chen, Jun XUE ... WO Patent WO2015105651 A1, 2015 | | 2015 |
| Density of metastable atoms in the plume of a low-pressure argon microplasma J Cooley, J Xue, R Urdahl APS Annual Gaseous Electronics Meeting Abstracts, FTP1. 010, 2011 | | 2011 |
| Low-Pressure Microwave Excited Microplasmas as Sources of VUV Photons and Metastable Excited Atoms: Experimental Measurements J Cooley, J Xue, R Urdahl APS Annual Gaseous Electronics Meeting Abstracts, DT3. 003, 2011 | | 2011 |
| Low-Pressure Microwave Excited Microplasmas as Sources of VUV Photons and Metastable Excited Atoms: Modeling M Kushner, J Cooley, J Xue, R Urdhal APS Annual Gaseous Electronics Meeting Abstracts, DT3. 006, 2011 | | 2011 |
| Scaling microplasma arrays for material processing C Wu, N Miura, J Xue, M Grunde, K Morrissey, J Hopwood Bulletin of the American Physical Society 55, 2010 | | 2010 |
| Particle-Microplasma Interactions J Xue, JA Hopwood 2007 IEEE 34th International Conference on Plasma Science (ICOPS), 179-179, 2007 | | 2007 |
| Particle trapping by dusty microplasmas J Xue, JA Hopwood The 33rd IEEE International Conference on Plasma Science, 2006. ICOPS 2006 …, 2006 | | 2006 |
