| VIS Fabry-Pérot-Interferometer with (HL) 4 PE-Si3N4/PE-SiO2 reflectors on freestanding LP-Si3N4 membranes for surface enhanced Raman spectroscopy C Helke, M Meinig, M Seifert, J Seiler, K Hiller, S Kurth, J Martin, ... MOEMS and Miniaturized Systems XV 9760, 84-94, 2016 | 12 | 2016 |
| On the fabrication and characterization of polymer-based waveguide probes for use in future optical cochlear implants C Helke, M Reinhardt, M Arnold, F Schwenzer, M Haase, M Wachs, ... Materials 16 (1), 106, 2022 | 7 | 2022 |
| Electrically tunable Fabry-Pérot interferometer with inherent compensation of the influence of gravitation and vibration M Meinig, S Kurth, C Helke, M Seifert, K Hiller, M Ebermann, N Neumann, ... | 7 | 2015 |
| VIS Fabry-Pérot Interferometer with structured (TiO2/PE-SiO2) ³ Bragg-reflectors on 5mm large LP-Si3N4 membranes C Helke, K Hiller, J Seiler, T Werner, M Meinig, S Kurth, T Otto MOEMS and miniaturized systems XVIII 10931, 169-176, 2019 | 6 | 2019 |
| Impact of Dielectric and Copper Via Design on Wafer-to-Wafer Hybrid Bonding V Dubey, D Wünsch, K Gottfried, M Wiemer, T Fischer, S Schermer, ... 2023 IEEE 73rd Electronic Components and Technology Conference (ECTC), 795-799, 2023 | 5 | 2023 |
| Large-scale fabrication of LP-CVD Si3N4 photonic crystal structures as freestanding reflectors with 1 mm aperture for Fabry-Pérot interferometers C Helke, K Hiller, T Werner, D Reuter, M Meinig, S Kurth, C Nowak, ... Nanoengineering: Fabrication, Properties, Optics, and Devices XIV 10354, 1035403, 2017 | 5 | 2017 |
| The BDRIE-HS* Technology Approach for Tiny Motion Detection with Improved Sensitivity and Noise Performance R Forke, K Hiller, S Hahn, A Shaporin, S Weidlich, D Bülz, M Küchler, ... 2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2022 | 4 | 2022 |
| Bridging the gap: Perspectives of nanofabrication technologies for application-oriented research M Baum, C Meinecke, T Blaudeck, C Helke, D Reuter, K Hiller, ... Journal of Vacuum Science & Technology B 39 (6), 2021 | 4 | 2021 |
| Next generation of highly miniaturized bulk-mems fabry-pérot filters for infrared microspectrometers M Ebermann, N Neumann, S Hoppe, K Hiller, J Seiler, C Helke, M Meinig, ... 2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019 | 4 | 2019 |
| Challenges of nanostructure-integration in Fabry-Pérot interferometers as alternative to Bragg reflectors: an example for Match 1: 1-, eBeam-, and nanoimprint lithography C Helke, K Hiller, JW Erben, D Reuter, M Meinig, S Kurth, C Nowak, ... 33rd European Mask and Lithography Conference 10446, 95-103, 2017 | 3 | 2017 |
| Selective immobilization of 6HB and Tablet DNA origami Templates on microstructured surfaces by DLC and CF-polymer contrasting suitable for microfluidic integration J Hann, C Helke, F Fischer, M Lakatos, A Heerwig, J Nestler, M Mertig, ... Materials Today: Proceedings 4 (7), 7114-7121, 2017 | 3 | 2017 |
| Smart Systems Integration 2011 T Geßner VDE-Verlag, 2011 | 3 | 2011 |
| Intra-level mix and match lithography with electron beam lithography and i-line stepper combined with resolution enhancement for structures below the CD-limit C Helke, CH Canpolat-Schmidt, G Heldt, S Schermer, S Hartmann, ... Micro and Nano Engineering 19, 100189, 2023 | 2 | 2023 |
| Tunable Fabry-Pérot interferometer integrated in a silicon waveguide of an on-chip optical platform for long infrared wavelengths J Wecker, K Hiller, T Großmann, S Hahn, S Kurth, C Helke, M Küchler, ... Silicon Photonics XVIII 12426, 125-140, 2023 | 2 | 2023 |
| Nanostructured al SWG Reflectors on thin LP-Si3N4 Membranes as (TiO2/SiO2)³ Bragg Reflector Alternative for Vis Fabry-Pérot Interferometers C Helke, K Hiller, J Seiler, JW Erben, T Werner, D Reuter, M Meinig, ... 2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019 | 2 | 2019 |
| Characterization of Thin AlN/Ag/AlN-Reflector Stacks on Glass Substrates for MEMS Applications C Behl, R Behlert, J Seiler, C Helke, A Shaporin, K Hiller Micro 4 (1), 142-156, 2024 | 1 | 2024 |
| Development of an e-beam/i-line stepper intra-level mix and match approach with the photoresist mr-EBL 6000.5 for PIC related structures such as waveguides, ring resonators and … M Reinhardt, C Helke, S Schermer, S Hartmann, A Voigt, D Reuter 38th European Mask and Lithography Conference (EMLC 2023) 12802, 142-149, 2023 | 1 | 2023 |
| Process and Design Challenges for Hybrid Bonding V Dubey, D Wünsch, K Gottfried, M Wiemer, T Fischer, A Hanisch, ... ECS Transactions 112 (3), 73, 2023 | 1 | 2023 |
| Integration of (Poly‐Si/Air)n Distributed Bragg Reflectors in a 150 mm Bulk Micromachined Wafer‐Level MOEMS Fabrication Process C Helke, J Seiler, M Meinig, TD Großmann, J Bonitz, M Haase, ... IEEJ Transactions on Electrical and Electronic Engineering, 2023 | 1 | 2023 |
| Lithographic performance of resist ma-N 1402 in an e-beam/i-line stepper intra-level mix and match approach CH Canpolat-Schmidt, G Heldt, C Helke, A Voigt, D Reuter 37th European Mask and Lithography Conference 12472, 99-107, 2022 | 1 | 2022 |
