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Joachim Burghartz
Joachim Burghartz
IMS CHIPS
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Title
Cited by
Cited by
Year
Method for making three dimensional circuit integration
CT Black, JN Burghartz, S Tiwari, JJ Welser
US Patent 5,998,292, 1999
5061999
75-GHz f/sub T/SiGe-base heterojunction bipolar transistors
GL Patton, JH Comfort, BS Meyerson, EF Crabbe, GJ Scilla, E De Fresart, ...
IEEE Electron Device Letters 11 (4), 171-173, 1990
4771990
On the design of RF spiral inductors on silicon
JN Burghartz, B Rejaei
IEEE transactions on electron devices 50 (3), 718-729, 2003
4492003
RF circuit design aspects of spiral inductors on silicon
JN Burghartz, DC Edelstein, M Soyuer, HA Ainspan, KA Jenkins
IEEE Journal of Solid-State Circuits 33 (12), 2028-2034, 1998
3741998
Microwave inductors and capacitors in standard multilevel interconnect silicon technology
JN Burghartz, M Soyuer, KA Jenkins
IEEE Transactions on Microwave Theory and Techniques 44 (1), 100-104, 1996
3151996
Silicon Heterostructure Handbook: Materials, Fabrication, Devices, Circuits and Applications of SiGe and Si Strained-Layer Epitaxy
JD Cressler, S Monfray, G Freeman, D Friedman, DJ Paul, S Tsujino, ...
CRC press, 2018
2992018
SiGe thin film or SOI MOSFET and method for making the same
JN Burghartz, BS Meyerson, YC Sun
US Patent 5,461,250, 1995
2931995
Bridging the gap between optical fibers and silicon photonic integrated circuits
WS Zaoui, A Kunze, W Vogel, M Berroth, J Butschke, F Letzkus, ...
Optics express 22 (2), 1277-1286, 2014
2772014
Contact resistance and megahertz operation of aggressively scaled organic transistors
F Ante, D Kälblein, T Zaki, U Zschieschang, K Takimiya, M Ikeda, ...
small 8 (1), 73-79, 2012
2622012
Integrated circuit inductor
JN Burghartz, DC Edelstein, CV Jahnes, CE Uzoh
US Patent 5,884,990, 1999
2171999
Substrate effects in monolithic RF transformers on silicon
KT Ng, B Rejaei, JN Burghartz
IEEE Transactions on Microwave Theory and Techniques 50 (1), 377-383, 2002
2132002
Multilevel-spiral inductors using VLSI interconnect technology
JN Burghartz, KA Jenkins, M Soyuer
IEEE Electron device letters 17 (9), 428-430, 1996
2121996
IEEE Electron Device Lett
GL Patton, JH Comfort, BS Meyerson, EF Crabbe, GJ Scilla, E De Fresart, ...
EDL-11 171 (1109), 55.61782, 1990
2111990
Spiral inductors and transmission lines in silicon technology using copper-damascene interconnects and low-loss substrates
JN Burghartz, DC Edelstein, KA Jenkiin, YH Kwark
IEEE Transactions on Microwave Theory and Techniques 45 (10), 1961-1968, 1997
2041997
Integrated circuit toroidal inductor
JN Burghartz, DC Edelstein, CV Jahnes, CE Uzoh
US Patent 5,793,272, 1998
2011998
Surface-passivated high-resistivity silicon substrates for RFICs
B Rong, JN Burghartz, LK Nanver, B Rejaei, M Van der Zwan
IEEE Electron Device Letters 25 (4), 176-178, 2004
2002004
Small contact resistance and high-frequency operation of flexible low-voltage inverted coplanar organic transistors
JW Borchert, B Peng, F Letzkus, JN Burghartz, PKL Chan, K Zojer, ...
Nature communications 10 (1), 1119, 2019
1972019
Ultra-thin chip technology and applications
J Burghartz
Springer Science & Business Media, 2010
1712010
Integrated circuit spiral inductor
JN Burghartz, DC Edelstein, CV Jahnes, CE Uzoh
US Patent 6,114,937, 2000
1712000
Spray coating of photoresist for pattern transfer on high topography surfaces
NP Pham, JN Burghartz, PM Sarro
Journal of Micromechanics and Microengineering 15 (4), 691, 2005
1612005
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