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Syam Parayil Venugopalan
Syam Parayil Venugopalan
ASML Research
Verified email at asml.com - Homepage
Title
Cited by
Cited by
Year
Plastic contact of self-affine surfaces: Persson’s theory versus discrete dislocation plasticity
SP Venugopalan, N Irani, L Nicola
Journal of the Mechanics and Physics of Solids 132, 103676, 2019
212019
Green’s function molecular dynamics meets discrete dislocation plasticity
SP Venugopalan, MH Müser, L Nicola
192017
Green's function molecular dynamics: including finite heights, shear, and body fields
SP Venugopalan, L Nicola, MH Müser
Modelling and Simulation in Materials Science and Engineering 25 (3), 034001, 2017
192017
Indentation of a plastically deforming metal crystal with a self-affine rigid surface: A dislocation dynamics study
SP Venugopalan, L Nicola
Acta Materialia 165, 709-721, 2019
182019
Multiscale modeling of plasma–surface interaction—General picture and a case study of Si and SiO2 etching by fluorocarbon-based plasmas
P Vanraes, S Parayil Venugopalan, A Bogaerts
Applied Physics Reviews 8 (4), 2021
112021
Plasma sheath modelling to predict etch-induced overlay
H Džafić, MR Kamali, SP Venugopalan
Journal of Physics D: Applied Physics 55 (7), 075201, 2021
52021
On sub-surface stress caused by contact roughness in compressible elastic solids
Y Murugesan, SP Venugopalan, L Nicola
42021
Assessing neutral transport mechanisms in aspect ratio dependent etching by means of experiments and multiscale plasma modeling
P Vanraes, SP Venugopalan, M Besemer, A Bogaerts
Plasma Sources Science and Technology 32 (6), 064004, 2023
12023
Systems and methods for optimizing metrology marks
SP Venugopalan
WO Patent WO2024017807A1, 2024
2024
Material, method and apparatus for forming a patterned layer of 2d material
SP Venugopalan
WO Patent WO2024002578A1, 2024
2024
Lithographic apparatus and associated methods
SP Venugopalan
WO Patent WO2023217495A1, 2023
2023
Methods of metrology and associated devices
SP Venugopalan
WO Patent WO2023198381A1, 2023
2023
Anisotropic resist patterning
SP Venugopalan
WO Patent WO2023169802A1, 2023
2023
Method of patterning a target layer, apparatus for patterning a target layer
SP Venugopalan
WO Patent WO2023126124A1, 2023
2023
Surrounding pattern and process aware metrology
SP Venugopalan
WO Patent WO2023104504A1, 2023
2023
Method of forming a patterned layer of material
SP Venugopalan
TW Patent TW202,226,915 A, 2022
2022
Multiscale physical etch modeling and methods thereof
S Parayil Venugopalan
EP Patent EP3961473A1, 2022
2022
Multiscale physical etch modeling and methods thereof
S Parayil Venugopalan
US Patent US20230297757A1, 2022
2022
Plastic deformation of self-affine rough metal surfaces under contact loading: A green’s function dislocation dynamics analysis
S Parayil Venugopalan
2019
Plastic deformation of self-affine rough metal surfaces under contact loading
SP Venugopalan
2019
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