Plastic contact of self-affine surfaces: Persson’s theory versus discrete dislocation plasticity SP Venugopalan, N Irani, L Nicola Journal of the Mechanics and Physics of Solids 132, 103676, 2019 | 21 | 2019 |
Green’s function molecular dynamics meets discrete dislocation plasticity SP Venugopalan, MH Müser, L Nicola | 19 | 2017 |
Green's function molecular dynamics: including finite heights, shear, and body fields SP Venugopalan, L Nicola, MH Müser Modelling and Simulation in Materials Science and Engineering 25 (3), 034001, 2017 | 19 | 2017 |
Indentation of a plastically deforming metal crystal with a self-affine rigid surface: A dislocation dynamics study SP Venugopalan, L Nicola Acta Materialia 165, 709-721, 2019 | 18 | 2019 |
Multiscale modeling of plasma–surface interaction—General picture and a case study of Si and SiO2 etching by fluorocarbon-based plasmas P Vanraes, S Parayil Venugopalan, A Bogaerts Applied Physics Reviews 8 (4), 2021 | 11 | 2021 |
Plasma sheath modelling to predict etch-induced overlay H Džafić, MR Kamali, SP Venugopalan Journal of Physics D: Applied Physics 55 (7), 075201, 2021 | 5 | 2021 |
On sub-surface stress caused by contact roughness in compressible elastic solids Y Murugesan, SP Venugopalan, L Nicola | 4 | 2021 |
Assessing neutral transport mechanisms in aspect ratio dependent etching by means of experiments and multiscale plasma modeling P Vanraes, SP Venugopalan, M Besemer, A Bogaerts Plasma Sources Science and Technology 32 (6), 064004, 2023 | 1 | 2023 |
Systems and methods for optimizing metrology marks SP Venugopalan WO Patent WO2024017807A1, 2024 | | 2024 |
Material, method and apparatus for forming a patterned layer of 2d material SP Venugopalan WO Patent WO2024002578A1, 2024 | | 2024 |
Lithographic apparatus and associated methods SP Venugopalan WO Patent WO2023217495A1, 2023 | | 2023 |
Methods of metrology and associated devices SP Venugopalan WO Patent WO2023198381A1, 2023 | | 2023 |
Anisotropic resist patterning SP Venugopalan WO Patent WO2023169802A1, 2023 | | 2023 |
Method of patterning a target layer, apparatus for patterning a target layer SP Venugopalan WO Patent WO2023126124A1, 2023 | | 2023 |
Surrounding pattern and process aware metrology SP Venugopalan WO Patent WO2023104504A1, 2023 | | 2023 |
Method of forming a patterned layer of material SP Venugopalan TW Patent TW202,226,915 A, 2022 | | 2022 |
Multiscale physical etch modeling and methods thereof S Parayil Venugopalan EP Patent EP3961473A1, 2022 | | 2022 |
Multiscale physical etch modeling and methods thereof S Parayil Venugopalan US Patent US20230297757A1, 2022 | | 2022 |
Plastic deformation of self-affine rough metal surfaces under contact loading: A green’s function dislocation dynamics analysis S Parayil Venugopalan | | 2019 |
Plastic deformation of self-affine rough metal surfaces under contact loading SP Venugopalan | | 2019 |