| Monitoring of the central blood pressure waveform via a conformal ultrasonic device C Wang, X Li, H Hu, L Zhang, Z Huang, M Lin, Z Zhang, Z Yin, B Huang, ... Nature biomedical engineering 2 (9), 687-695, 2018 | 615 | 2018 |
| Bioadhesive ultrasound for long-term continuous imaging of diverse organs C Wang, X Chen, L Wang, M Makihata, HC Liu, T Zhou, X Zhao Science 377 (6605), 517-523, 2022 | 216 | 2022 |
| Continuous monitoring of deep-tissue haemodynamics with stretchable ultrasonic phased arrays C Wang, B Qi, M Lin, Z Zhang, M Makihata, B Liu, S Zhou, Y Huang, H Hu, ... Nature biomedical engineering 5 (7), 749-758, 2021 | 125 | 2021 |
| Integration and packaging technology of MEMS-on-CMOS capacitive tactile sensor for robot application using thick BCB isolation layer and backside-grooved electrical connection M Makihata, S Tanaka, M Muroyama, S Matsuzaki, H Yamada, ... Sensors and Actuators A: Physical 188, 103-110, 2012 | 36 | 2012 |
| Dynamic quantity sensor and dynamic quantity sensor system Y Hata, Y Nonomura, M Fujiyoshi, H Funabashi, T Akashi, Y Omura, ... US Patent 9,134,189, 2015 | 26 | 2015 |
| Design and fabrication technology of low profile tactile sensor with digital interface for whole body robot skin M Makihata, M Muroyama, S Tanaka, T Nakayama, Y Nonomura, ... Sensors 18 (7), 2374, 2018 | 25 | 2018 |
| Adhesive wafer bonding using a molded thick benzocyclobutene layer for wafer-level integration of MEMS and LSI M Makihata, S Tanaka, M Muroyama, S Matsuzaki, H Yamada, ... Journal of Micromechanics and Microengineering 21 (8), 085002, 2011 | 22 | 2011 |
| A 1.7mm3MEMS-on-CMOS tactile sensor using human-inspired autonomous common bus communication M Makihata, M Muroyama, Y Nakano, S Tanaka, T Nakayama, ... 2013 Transducers & Eurosensors XXVII: The 17th International Conference on …, 2013 | 21 | 2013 |
| Sensor device having electrode draw-out portions through side of substrate S Tanaka, M Esashi, M Muroyama, S Matsuzaki, M Makihata, ... US Patent 8,823,114, 2014 | 18 | 2014 |
| Development of an LSI for tactile sensor systems on the whole-body of robots M Muroyama, M Makihata, Y Nakano, S Matsuzaki, H Yamada, ... IEEJ Transactions on Sensors and Micromachines 131 (8), 302-309, 2011 | 13 | 2011 |
| An SOI tactile sensor with a quad seesaw electrode for 3-axis complete differential detection Y Hata, Y Nonomura, H Funabashi, T Akashi, M Fujiyoshi, Y Omura, ... 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems …, 2014 | 12 | 2014 |
| Tactile sensor network system with CMOS-MEMS integration for social robot applications M Muroyama, M Makihata, S Tanaka, T Kojima, T Nakayama, ... Smart Systems Integration-8th International Conference and Exhibition on …, 2014 | 12 | 2014 |
| Sensor system M Muroyama, M Esashi, S Tanaka, S Matsuzaki, M Makihata, ... US Patent 8,336,399, 2012 | 12 | 2012 |
| Evaluation and application of resist for alkaline wet etching T Takahashi, M Makihata, M Esashi, S Tanaka IEEJ Transactions on Sensors and Micromachines 130 (9), 421-425, 2010 | 11 | 2010 |
| MEMS-based non-contact voltage sensor with multi-mode resonance shutter M Makihata, K Matsushita, AP Pisano Sensors and Actuators A: Physical 294, 25-36, 2019 | 10 | 2019 |
| LSI design for sensing data transmission by interruption in tactile sensor systems M Muroyama, M Makihata, S Matsuzaki, H Yamada, U Yamaguchi, ... IEEJ transactions on sensors and micromachines 129 (12), 450-460+ 4, 2009 | 10 | 2009 |
| Energy storage in paraffin: A PDE backstepping experiment S Koga, M Makihata, R Chen, M Krstic, AP Pisano IEEE Transactions on Control Systems Technology 29 (4), 1490-1502, 2020 | 8 | 2020 |
| Integration and packaging technology of MEMS-on-CMOS tactile sensor for robot application using molded thick BCB layer and backside-grooved electrical connection M Makihata, S Tanaka, M Muroyama, S Matsuzaki, H Yamada, ... 2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011 | 8 | 2011 |
| Sheet-like tactile sensor system M Muroyama, M Esashi, S Tanaka, S Matsuzaki, M Makihata, ... US Patent 8,613,231, 2013 | 5 | 2013 |
| MEMS-CMOS Integrated tactile sensor with digital signal processing for robot application M Makihata, M Muroyama, S Tanaka, H Yamada, T Nakayama, ... MRS Online Proceedings Library 1427, 98-105, 2012 | 5 | 2012 |
Shuji TanakaTohoku UniversityVerified email at mems.mech.tohoku.ac.jp
