关注
Fang Zhidong
Fang Zhidong
Division of Materials and Manufacturing Science, Graduate School of Engineering, Osaka University
在 mat.eng.osaka-u.ac.jp 的电子邮件经过验证
标题
引用次数
引用次数
年份
An efficient approach for atomic-scale polishing of single-crystal silicon via plasma-based atom-selective etching
Z Fang, Y Zhang, R Li, Y Liang, H Deng
International Journal of Machine Tools and Manufacture 159, 103649, 2020
332020
Role of oxygen in surface kinetics of SiO2 growth on single crystal SiC at elevated temperatures
Y Zhang, S Liang, Y Zhang, R Li, Z Fang, S Wang, H Deng
Ceramics International 47 (2), 1855-1864, 2021
62021
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