| Algorithms for scanned probe microscope image simulation, surface reconstruction, and tip estimation JS Villarrubia Journal of research of the National Institute of Standards and Technology …, 1997 | 906 | 1997 |
| Nanoindentation of polymers: an overview MR VanLandingham, JS Villarrubia, WF Guthrie, GF Meyers Macromolecular symposia 167 (1), 15-44, 2001 | 640 | 2001 |
| Morphological estimation of tip geometry for scanned probe microscopy JS Villarrubia Surface science 321 (3), 287-300, 1994 | 408 | 1994 |
| Experimental test of blind tip reconstruction for scanning probe microscopy LS Dongmo, JS Villarrubia, SN Jones, TB Renegar, MT Postek, JF Song Ultramicroscopy 85 (3), 141-153, 2000 | 180 | 2000 |
| Formation of Si (111)-(1× 1) Cl JJ Boland, JS Villarrubia Physical Review B 41 (14), 9865, 1990 | 168 | 1990 |
| Scanned probe microscope tip characterization without calibrated tip characterizers JS Villarrubia Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1996 | 165 | 1996 |
| Scanning-tunneling-microscopy study of the Si (111)-7× 7 rest-atom layer following adatom removal by reaction with Cl JS Villarrubia, JJ Boland Physical review letters 63 (3), 306, 1989 | 129 | 1989 |
| Nitric oxide adsorption, decomposition, and desorption on Rh (100) JS Villarrubia, W Ho The Journal of chemical physics 87 (1), 750-764, 1987 | 129 | 1987 |
| Determination of optimal parameters for CD-SEM measurement of line-edge roughness BD Bunday, M Bishop, DW McCormack Jr, JS Villarrubia, AE Vladar, ... Metrology, Inspection, and Process Control for Microlithography XVIII 5375 …, 2004 | 115 | 2004 |
| Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library JS Villarrubia, AE Vladár, B Ming, RJ Kline, DF Sunday, JS Chawla, S List Ultramicroscopy 154, 15-28, 2015 | 114 | 2015 |
| Scanning electron microscope dimensional metrology using a model‐based library JS Villarrubia, AE Vladár, MT Postek Surface and Interface Analysis: An International Journal devoted to the …, 2005 | 102 | 2005 |
| Scanning electron microscope analog of scatterometry JS Villarrubia, AE Vladar, JR Lowney, MT Postek Jr Metrology, Inspection, and Process Control for Microlithography XVI 4689 …, 2002 | 98 | 2002 |
| Unbiased estimation of linewidth roughness JS Villarrubia, BD Bunday Metrology, Inspection, and Process Control for Microlithography XIX 5752 …, 2005 | 94 | 2005 |
| Identification of the Products from the Reaction of Chlorine with the Silicon (111)-(7× 7) Surface JJ Boland, JS Villarrubia Science 248 (4957), 838-840, 1990 | 85 | 1990 |
| The populations of bridge and top site CO on Rh (100) vs coverage, temperature, and during reaction with O BA Gurney, LJ Richter, JS Villarrubia, W Ho The Journal of chemical physics 87 (11), 6710-6721, 1987 | 84 | 1987 |
| Simulation study of repeatability and bias in the CD-SEM JS Villarrubia, AE Vladar, MT Postek Metrology, Inspection, and Process Control for Microlithography XVII 5038 …, 2003 | 81 | 2003 |
| CD-SEM measurement line-edge roughness test patterns for 193-nm lithography BD Bunday, M Bishop, JS Villarrubia, AE Vladar Metrology, inspection, and process control for microlithography XVII 5038 …, 2003 | 70 | 2003 |
| Monte Carlo modeling of secondary electron imaging in three dimensions JS Villarrubia, NWM Ritchie, JR Lowney Metrology, Inspection, and Process Control for Microlithography XXI 6518 …, 2007 | 65 | 2007 |
| Blind estimation of general tip shape in AFM imaging F Tian, X Qian, JS Villarrubia Ultramicroscopy 109 (1), 44-53, 2008 | 63 | 2008 |
| Dimensional metrology of resist lines using a SEM model-based library approach JS Villarrubia, AE Vladar, BD Bunday, M Bishop Metrology, Inspection, and Process Control for Microlithography XVIII 5375 …, 2004 | 58 | 2004 |
