| Near‐complete elimination of size‐dependent efficiency decrease in GaN micro‐light‐emitting diodes J Zhu, T Takahashi, D Ohori, K Endo, S Samukawa, M Shimizu, XL Wang physica status solidi (a) 216 (22), 1900380, 2019 | 44 | 2019 |
| Atomic layer germanium etching for 3D Fin-FET using chlorine neutral beam D Ohori, T Fujii, S Noda, W Mizubayashi, K Endo, ET Lee, Y Li, YJ Lee, ... Journal of Vacuum Science & Technology A 37 (2), 2019 | 15 | 2019 |
| Coherent and incoherent impacts of nanopillars on the thermal conductivity in silicon nanomembranes X Huang, D Ohori, R Yanagisawa, R Anufriev, S Samukawa, M Nomura ACS applied materials & interfaces 12 (22), 25478-25483, 2020 | 14 | 2020 |
| High-quality nanodisk of InGaN/GaN MQWs fabricated by neutral-beam-etching and GaN regrowth: towards directional micro-LED in top-down structure K Zhang, T Takahashi, D Ohori, G Cong, K Endo, N Kumagai, ... Semiconductor Science and Technology 35 (7), 075001, 2020 | 13 | 2020 |
| Atomic-layer etching of GaN by using an HBr neutral beam D Ohori, T Sawada, K Sugawara, M Okada, K Nakata, K Inoue, D Sato, ... Journal of Vacuum Science & Technology A 38 (3), 2020 | 10 | 2020 |
| High electron mobility germanium FinFET fabricated by atomic layer defect-free and roughness-free etching D Ohori, T Fujii, S Noda, W Mizubayashi, K Endo, YJ Lee, JH Tarng, Y Li, ... IEEE Open Journal of Nanotechnology 2, 26-30, 2021 | 9 | 2021 |
| Room-temperature and high-quality HfO2/SiO2 gate stacked film grown by neutral beam enhanced atomic layer deposition B Ge, D Ohori, YH Chen, T Ozaki, K Endo, Y Li, JH Tarng, S Samukawa Journal of Vacuum Science & Technology A 40 (2), 2022 | 7 | 2022 |
| Fabrication and simulation of neutral-beam-etched silicon nanopillars MH Chuang, D Ohori, Y Li, KR Chou, S Samukawa Vacuum 181, 109577, 2020 | 6 | 2020 |
| Atomic layer defect-free etching for germanium using HBr neutral beam T Fujii, D Ohori, S Noda, Y Tanimoto, D Sato, H Kurihara, W Mizubayashi, ... Journal of Vacuum Science & Technology A 37 (5), 2019 | 6 | 2019 |
| Photoluminescence emission from GaAs nanodisks in GaAs/AlGaAs nanopillar arrays fabricated by neutral beam etching D Ohori, A Fukuyama, K Sakai, A Higo, C Thomas, S Samukawa, T Ikari Japanese Journal of Applied Physics 56 (5), 050308, 2017 | 6 | 2017 |
| 3.5 × 3.5 μm2 GaN blue micro-light-emitting diodes with negligible sidewall surface nonradiative recombination X Wang, X Zhao, T Takahashi, D Ohori, S Samukawa Nature Communications 14 (1), 7569, 2023 | 4 | 2023 |
| Numerical Simulation of Thermal Conductivity of SiNW–SiGe0.3 Composite for Thermoelectric Applications MY Lee, Y Li, MH Chuang, D Ohori, S Samukawa IEEE Transactions on Electron Devices 67 (5), 2088-2092, 2020 | 4 | 2020 |
| Optical properties of quantum energies in GaAs quantum nanodisks produced using a bio-nanotemplate and a neutral beam etching technique D Ohori, A Fukuyama, C Thomas, A Higo, S Samukawa, T Ikari Japanese Journal of Applied Physics 55 (9), 092101, 2016 | 4 | 2016 |
| Impact of nanopillars on phonon dispersion and thermal conductivity of silicon membranes R Anufriev, D Ohori, Y Wu, R Yanagisawa, L Jalabert, S Samukawa, ... Nanoscale 15 (5), 2248-2253, 2023 | 3 | 2023 |
| Management of phonon transport in lateral direction for gap-controlled si nanopillar/SiGe interlayer composite materials D Ohori, MH Chuang, A Sato, S Takeuchi, M Murata, A Yamamoto, ... IEEE Open Journal of Nanotechnology 2, 148-152, 2021 | 3 | 2021 |
| Enhancing the Performance of E-mode AlGaN/GaN HEMTs with Recessed Gates through Low-Damage Neutral Beam Etching and Post-Metallization Annealing YH Chen, D Ohori, M Aslam, YJ Lee, Y Li, S Samukawa IEEE Open Journal of Nanotechnology, 2023 | 2 | 2023 |
| Si Nanopillar/SiGe composite structure for thermally managed Nano-devices D Ohori, M Murata, A Yamamoto, K Endo, MH Chuang, MY Lee, Y Li, ... 2021 IEEE 21st International Conference on Nanotechnology (NANO), 199-202, 2021 | 2 | 2021 |
| 3J5-2 Theoretical study on the photothermal signal of the multilayer structure and application to the Si-nanopillar/SiGe composite films Y Arata, T Harada, D Ohori, S Samukawa, T Ikari, A Fukuyama Proceedings of Symposium on Ultrasonic Electronics 41, 3J5-2, 2020 | 2 | 2020 |
| Decreasing of the thermal conductivity of Si nanopillar/SiGe composite films investigated by using a piezoelectric photothermal spectroscopy T Harada, T Aki, D Ohori, S Samukawa, T Ikari, A Fukuyama Japanese Journal of Applied Physics 59 (SK), SKKA08, 2020 | 2 | 2020 |
| Growing low-temperature, high-quality silicon-dioxide films by neutral-beam enhanced atomic-layer deposition HH Chen, S Toko, D Ohori, T Ozaki, M Utsuno, T Kubota, T Nozawa, ... Journal of Physics D: Applied Physics 53 (1), 015204, 2019 | 2 | 2019 |
