Atomic layer deposition onto carbon fiber fabrics C Militzer, P Dill, WA Goedel Journal of the American Ceramic Society 100 (12), 5409-5420, 2017 | 9 | 2017 |
Atomic layer deposition onto fabrics of carbon and silicon carbide fibers: Preparation of multilayers comprising alumina, titania-furfuryl alcohol hybrid, and titanium phosphate P Dill, F Pachel, C Militzer, A Held, G Puchas, S Knohl, W Krenkel, ... Journal of Vacuum Science & Technology A 39 (5), 2021 | 5 | 2021 |
Atomic layer deposition of titanium phosphate onto reinforcing fibers using titanium tetrachloride, water, and tris (trimethylsilyl) phosphate as precursors P Dill, X Ren, H Hintersatz, M Franz, D Dentel, C Tegenkamp, S Ebert Journal of Vacuum Science & Technology A 40 (2), 2022 | 2 | 2022 |
Alumina layers deposited by atomic layer deposition with different precursors: Surface photovoltage measurements V Kolkovsky, P Dill Microelectronics Reliability 150, 115075, 2023 | | 2023 |