Piezoelectric aluminum nitride nanoelectromechanical actuators N Sinha, GE Wabiszewski, R Mahameed, VV Felmetsger, SM Tanner, ... Applied Physics Letters 95 (5), 2009 | 193 | 2009 |
Method and system for reducing thermal protrusion of an NFT SM Tanner, Y Hu US Patent 8,565,049, 2013 | 162 | 2013 |
Method and system for providing an NFT using a sacrificial NFT structure SM Tanner, Y Hu, U Tran, Z Wang US Patent 8,491,801, 2013 | 159 | 2013 |
Method and system for providing an energy assisted magnetic recording writer having a heat sink and NFT Z Wang, W Gao, SM Tanner, M Abatchev, Y Chen, Y Hu US Patent 8,721,902, 2014 | 158 | 2014 |
High-Q GaN nanowire resonators and oscillators SM Tanner, JM Gray, CT Rogers, KA Bertness, NA Sanford Applied Physics Letters 91 (20), 2007 | 156 | 2007 |
System and method for fabricating a magnetic recording pole L Ji, M Jiang, JS Marcelino, SM Tanner, D Wan, TYW Jiang US Patent 8,625,233, 2014 | 150 | 2014 |
Structure and method to measure waveguide power absorption by surface plasmon element SM Tanner, Y Hu, U Tran, Z Wang, Z Shi, S Sochava US Patent 8,749,790, 2014 | 137 | 2014 |
Methods and apparatuses for performing wafer level characterization of a plasmon element SM Tanner, Y Hu, S Sochava US Patent 8,753,903, 2014 | 133 | 2014 |
Innovative technique for tailoring intrinsic stress in reactively sputtered piezoelectric aluminum nitride films VV Felmetsger, PN Laptev, SM Tanner Journal of Vacuum Science & Technology A 27 (3), 417-422, 2009 | 43 | 2009 |
Microstructure and chemical wet etching characteristics of AlN films deposited by ac reactive magnetron sputtering SM Tanner, VV Felmetsger Journal of Vacuum Science & Technology A 28 (1), 69-76, 2010 | 33 | 2010 |
Bi-layer NFT-core spacer for EAMR system and method of making the same Z Wang, H Yuan, SM Tanner, Y Hu US Patent 8,773,956, 2014 | 32 | 2014 |
Design, operation mode, and stress control capability of S-Gun magnetron for ac reactive sputtering VV Felmetsger, PN Laptev, SM Tanner Surface and Coatings Technology 204 (6-7), 840-844, 2009 | 27 | 2009 |
Ultra thin AlN piezoelectric nano-actuators N Sinha, GE Wabiszewski, R Mahameed, VV Felmetsger, SM Tanner, ... TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009 | 22 | 2009 |
Crystal orientation and stress in ac reactively sputtered AlN films on Mo electrodes for electro-acoustic devices VV Felmetsger, PN Laptev, SM Tanner 2008 IEEE Ultrasonics Symposium, 2146-2149, 2008 | 20 | 2008 |
Method and system for providing an energy assisted magnetic recording writer having a self aligned heat sink and NFT Y Hu, SM Tanner, U Tran, Z Wang, M Abatchev US Patent 8,834,728, 2014 | 8 | 2014 |
Heat assisted magnetic recording head having near-field transducer with a sloped nose SM Tanner, M Yu, M Zheng, K Lee, TY Chen US Patent 10,106,885, 2018 | 5 | 2018 |
Microstructure of piezoelectric AlN films deposited by AC reactive sputtering SM Tanner, VV Felmetsger 2009 IEEE International Ultrasonics Symposium, 1691-1694, 2009 | 3 | 2009 |
Fabrication process for cantilevers with integrated tunnel junctions SM Tanner, CT Rogers Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2008 | 3 | 2008 |
Method for providing heat assisted magnetic recording write apparatus having a near-field transducer with a sloped nose SM Tanner, M Yu, M Zheng, K Lee, TY Chen US Patent 9,786,304, 2017 | 2 | 2017 |
HEAT ASSISTED MAGNETIC RECORDING (HAMR) WRITE HEAD WITH ENHANCED STABILITY AND METHODS FOR MAKING THE SAME SH Wee, S Tanner, H Balamane, P Senanayake, T Matsumoto US Patent App. 18/234,248, 2024 | | 2024 |