| A high-SPL piezoelectric MEMS loud speaker based on thin ceramic PZT H Wang, Z Chen, H Xie Sensors and Actuators A: Physical 309, 112018, 2020 | 41 | 2020 |
| Review of recent development of MEMS speakers H Wang, Y Ma, Q Zheng, K Cao, Y Lu, H Xie Micromachines 12 (10), 1257, 2021 | 40 | 2021 |
| MEMS ultrasound transducers for endoscopic photoacoustic imaging applications H Wang, Y Ma, H Yang, H Jiang, Y Ding, H Xie Micromachines 11 (10), 928, 2020 | 34 | 2020 |
| A one-step residue-free wet etching process of ceramic PZT for piezoelectric transducers H Wang, M Godara, Z Chen, H Xie Sensors and Actuators A: Physical 290, 130-136, 2019 | 32 | 2019 |
| A ceramic PZT-based PMUT array for endoscopic photoacoustic imaging H Wang, Z Chen, H Yang, H Jiang, H Xie Journal of Microelectromechanical Systems 29 (5), 1038-1043, 2020 | 28 | 2020 |
| Design and fabrication of a piezoelectric micromachined ultrasonic transducer array based on ceramic PZT H Wang, Y Yu, Z Chen, H Yang, H Jiang, H Xie 2018 IEEE sensors, 1-4, 2018 | 21 | 2018 |
| Development of dual-frequency PMUT arrays based on thin ceramic PZT for endoscopic photoacoustic imaging H Wang, H Yang, Z Chen, Q Zheng, H Jiang, PXL Feng, H Xie Journal of Microelectromechanical Systems 30 (5), 770-782, 2021 | 18 | 2021 |
| AlScN‐on‐SiC Thin Film Micromachined Resonant Transducers Operating in High‐Temperature Environment up to 600° C W Sui, H Wang, J Lee, A Qamar, M Rais‐Zadeh, PXL Feng Advanced Functional Materials 32 (34), 2202204, 2022 | 14 | 2022 |
| A piezoelectric MEMS loud speaker based on ceramic PZT H Wang, M Li, Y Yu, Z Chen, Y Ding, H Jiang, H Xie 2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019 | 14 | 2019 |
| A multi-frequency PMUT array based on ceramic PZT for endoscopic photoacoustic imaging H Wang, H Yang, H Jiang, Z Chen, PXL Feng, H Xie 2021 21st International Conference on Solid-State Sensors, Actuators and …, 2021 | 12 | 2021 |
| A dual-electrode MEMS speaker based on ceramic PZT with improved sound pressure level by phase tuning H Wang, PXL Feng, H Xie 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021 | 12 | 2021 |
| A high-density and dual-frequency PMUT array based on thin ceramic PZT for endoscopic photoacoustic imaging H Wang, PXL Feng, H Xie 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021 | 10 | 2021 |
| Thermal Reliability Study of an Electrothermal MEMS Mirror H Wang, L Zhou, X Zhang, H Xie IEEE Transactions on Device and Materials Reliability 18 (3), 422-428, 2018 | 10 | 2018 |
| Thin ceramic PZT dual-and multi-frequency pMUT arrays for photoacoustic imaging Q Zheng, H Wang, H Yang, H Jiang, Z Chen, Y Lu, PXL Feng, H Xie Microsystems & Nanoengineering 8 (1), 122, 2022 | 9 | 2022 |
| Characterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation H Wang, X Zhang, D Zhang, L Zhou, H Xie 2017 International Conference on Optical MEMS and Nanophotonics (OMN), 1-2, 2017 | 4 | 2017 |
| Micromachined Thin Film Ceramic PZT Multimode Resonant Temperature Sensor W Sui, T Kaisar, H Wang, Y Wu, J Lee, H Xie, PXL Feng IEEE Sensors Journal, 2023 | 2 | 2023 |
| Thin Film PZT Multimode Resonant MEMS Temperature Sensor W Sui, T Kaisar, H Wang, Y Wu, J Lee, H Xie, PXL Feng 2022 IEEE Sensors, 1-4, 2022 | 2 | 2022 |
| 基于高压应力的氮化铝 MEMS 压电微扬声器 于媛媛， 王浩然， 张代化， 谢会开 传感技术学报 31 (8), 1141-1146, 2018 | 1 | 2018 |
Huikai XieProfessor of Microelectronics and MEMS, Beijing Institute of TechnologyVerified email at bit.edu.cn
