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Thibaut MAURICE
Thibaut MAURICE
Epitaxy Specialist [SOITEC, IMEC]
Verified email at imec.be
Title
Cited by
Cited by
Year
Support-integrated donor wafers for repeated thin donor layer separation
F Letertre, T Maurice, SOITEC
US Patent 6,815,309, 2004
2102004
Method for recycling a substrate
C Maleville, F Letertre, T Maurice, C Mazure, F Metral, SOITEC
US Patent 7,022,586, 2006
962006
Donor wafers for repeated thin donor layer separation
F Letertre, T Maurice, SOITEC
US Patent 6,908,828, 2005
382005
Wafer-scale integration of double gated WS2-transistors in 300mm Si CMOS fab
I Asselberghs, Q Smets, T Schram, B Groven, D Verreck, A Afzalian, ...
2020 IEEE International Electron Devices Meeting (IEDM), 40.2. 1-40.2. 4, 2020
362020
Optical Properties of Bismuth Telluride Thin Films, Bi2Te3/Si(100) and Bi2Te3/SiO2/Si(100)
EH Kaddouri, T Maurice, X Gratens, S Charar, S Benet, A Mefleh, ...
physica status solidi (a) 176 (2), 1071-1076, 1999
321999
Method of manufacturing a wafer
T Maurice, E Guiot, SOITEC
US Patent 7,217,639, 2007
242007
The effect of order and dose of H and He sequential implantation on defect formation and evolution in silicon
P Nguyen, KK Bourdelle, T Maurice, N Sousbie, A Boussagol, X Hebras, ...
Journal of applied physics 101 (3), 2007
242007
Two-stage annealing method for manufacturing semiconductor substrates
C Berne, B Ghyselen, C Lagahe, T Maurice, SOITEC
US Patent 6,936,523, 2005
222005
Method of manufacturing a wafer
T Maurice, I Cayrefourcq, F Fournel, SOITEC
US Patent 6,838,358, 2005
212005
Scaling of double-gated WS2 FETs to sub-5nm physical gate length fabricated in a 300mm FAB
Q Smets, T Schram, D Verreck, D Cott, B Groven, Z Ahmed, B Kaczer, ...
2021 IEEE International Electron Devices Meeting (IEDM), 34.2. 1-34.2. 4, 2021
182021
Raman and photoluminescence spectroscopy from n-and p-type 6H-SIC alpha-particle irradiated
HW Kunert, T Maurice, J Barnas, J Malherbe, DJ Brink, L Prinsloo
Vacuum 78 (2-4), 503-508, 2005
182005
Mid Infrared Optical Investigations of Pb1—xEuxSe ∥ BaF2 Thin Films Grown by MBE
T Maurice, F Mahoukou, G Breton, S Charar, P Masri, M Averous, ...
physica status solidi (b) 209 (2), 523-534, 1998
171998
MOVPE In1-xGaxAs high mobility channel for 3-D NAND memory.
E Capogreco, J Lisoni, T Maurice, A Arreghini, A Subirats, B Kunert, ...
In: International Electron Devices Meeting - IEDM., 2015
152015
High yield and process uniformity for 300 mm integrated WS2 FETs
T Schram, Q Smets, D Radisic, B Groven, D Cott, A Thiam, W Li, E Dupuy, ...
2021 Symposium on VLSI Technology, 1-2, 2021
132021
Scaled transistors with 2D materials from the 300mm fab
I Asselberghs, T Schram, Q Smets, B Groven, S Brems, A Phommahaxay, ...
2020 IEEE Silicon Nanoelectronics Workshop (SNW), 67-68, 2020
112020
Depth profiling of high-energy hydrogen-implanted 6H-SiC
DJ Brink, T Maurice, S Blanque, H Kunert, J Camassel, J Pascual
Applied optics 43 (6), 1275-1280, 2004
102004
Method for fabricating a semiconductor substrate and semiconductor substrate
C Figuet, C Bouvier, C Cailler, A Drouin, T Maurice, SOITEC
US Patent App. 12/644,275, 2009
72009
Raman and photoluminescence spectroscopy from N2+-ion implanted and α-irradiated and annealed GaN/sapphire
HW Kunert, TP Maurice, DJ Brink, LC Prinsloo, JB Malherbe, J Camassel
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2001
72001
Epitaxy induced phase stabilization: a comparative experimental and elasticity-based theoretical study on MBE grown PbSe/CaF2/Si epilayer
G Breton, T Maurice, P Masri, S Charar, M Averous
International Journal of Inorganic Materials 3 (8), 1237-1239, 2001
62001
Effects of hydrogen implantation and annealing on the vibrational properties of 6H-SiC
HW Kunert, T Hauser, JB Malherbe, DJ Brink, TP Maurice, LC Prinsloo, ...
Materials Science Forum 353, 2001
62001
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