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Rahul A Trivedi
Rahul A Trivedi
GlobalFoundries, Intel, Arizona State University
Verified email at asu.edu - Homepage
Title
Cited by
Cited by
Year
Epitaxial methods and templates grown by the methods
C Arena, CJ Werkhoven, RT Bertram, E Lindow, S Mahajan, R Datta, ...
JP Patent JP5903714B2, 2016
512016
Epitaxial methods and templates grown by the methods
C Arena, CJ Werkhoven, RT Bertram, E Lindow, S Mahajan, R Datta, ...
KR Patent KR101374090B1, 2014
512014
Epitaxial methods and templates grown by the methods
C Arena, CJ Werkhoven, RT Bertram, E Lindow, S Mahajan, R Datta, ...
US Patent US20090098343A1, 2013
512013
Epitaxial methods and templates grown by the methods
C Arena, CJ Werkhoven, RT Bertram, E Lindow, S Mahajan, R Datta, ...
US Patent 8,574,968, 2013
512013
Epitaxial methods and templates grown by the methods
C Arena, CJ Werkhoven, RT Bertram, E Lindow, S Mahajan, R Datta, ...
CN Patent CN101,743,618 B, 2012
512012
Epitaxial methods and templates grown by the methods
C Arena, CJ Werkhoven, RT Bertram, E Lindow, S Mahajan, R Datta, ...
JP Patent JP2,010,534,612 A, 2010
512010
Epitaxial methods and templates grown by the methods
C Arena, CJ Werkhoven, RT Bertram, E Lindow, S Mahajan, R Datta, ...
CN Patent CN101,743,618 A, 2010
512010
Epitaxial methods and templates grown by the methods
C Arena, CJ Werkhoven, RT Bertram, E Lindow, S Mahajan, R Datta, ...
KR Patent KR20,100,045,443 A, 2010
512010
Epitaxial methods and templates grown by the methods
C Arena, CJ Werkhoven, RT Bertram, E Lindow, S Mahajan, R Datta, ...
EP Patent EP2171748A1, 2010
512010
Epitaxial methods and templates grown by the methods
C Arena, CJ Werkhoven, RT Bertram, E Lindow, S Mahajan, R Datta, ...
WO Patent WO2009015350A1, 2009
51*2009
Mismatched Heteroepitaxy of Tetrahedral Semiconductors with Si via ZrB2 Templates
R Trivedi, PL Liu, R Roucka, J Tolle, AVG Chizmeshya, IST Tsong, ...
Chemistry of materials 17 (18), 4647-4652, 2005
172005
Low-temperature GaN growth on silicon substrates by single gas-source epitaxy and photo-excitation
RA Trivedi, J Tolle, AVG Chizmeshya, R Roucka, C Ritter, J Kouvetakis, ...
Applied Physics Letters 87 (7), 2005
92005
Storage Temperature Effects on the Slurry Health Parameters and SiO2 Removal Rates during Chemical Mechanical Polishing
J Seo, A Othman, HJ Kim, J Devabhaktuni, R Trivedi, D Penigalapati, ...
ECS Journal of Solid State Science and Technology 10 (10), 104002, 2021
12021
Understanding and Mitigating Temperature-Induced Agglomeration in Silica-based Chemical Mechanical Planarization (CMP) Slurry Storage
A Othman, HJ Kim, R Trivedi, T Kulasingam, J Seo
Colloids and Surfaces A: Physicochemical and Engineering Aspects, 133802, 2024
2024
Design Considerations for CMP Slurry Delivery Systems
RA Trivedi, T Kulasingam
2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC …, 2021
2021
CMP defects: Influence of CMP slurry, handling and delivery
RA Trivedi, HJ Kim, T Kulasingam, D Penigalapati, J Devabhaktuni, ...
CMPUG Fall Meeting: Advancements in CMP Applications and Research, 2020
2020
Effect of Slurry Preparation in Facilities Systems on CMP Process Performance
RA Trivedi, C Buie, J Kiernan, T Kulasingam, HJ Kim, TH Lee, C Aparece
International Conference on Planarization/CMP Technology 2018, 2018
2018
A Study of Initial Stages of High Temperature Growth of Gallium Nitride on Sapphire
RA Trivedi
Arizona State University, 2008
2008
Zinc blende silicon carbide films on Si(111) via a zirconium diboride buffer
R Trivedi, J Tolle, IST Tsong, J Kouvetakis
Research in Engineering and Applied Sciences Symposium, 2004
2004
Integration of Cubic Optical Semiconductors with Silicon Via a Zirconium Diboride Buffer Layer
RA Trivedi
Arizona State University, 2004
2004
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