Tungsten Nitrido Complexes as Precursors for Low Temperature Chemical Vapor Deposition of WNxCy Films as Diffusion Barriers for Cu Metallization KR McClain, C O’Donohue, A Koley, RO Bonsu, KA Abboud, JC Revelli, ... Journal of the American Chemical Society 136 (4), 1650-1662, 2014 | 36 | 2014 |
Aerosol-assisted chemical vapor deposition of tungsten oxide films and nanorods from oxo tungsten (VI) fluoroalkoxide precursors H Kim, RO Bonsu, C O’Donohue, RY Korotkov, L McElwee-White, ... ACS Applied Materials & Interfaces 7 (4), 2660-2667, 2015 | 27 | 2015 |
Partially fluorinated oxo-alkoxide tungsten (vi) complexes as precursors for deposition of WO x nanomaterials RO Bonsu, H Kim, C O'Donohue, RY Korotkov, KR McClain, KA Abboud, ... Dalton Transactions 43 (24), 9226-9233, 2014 | 26 | 2014 |
Synthesis and evaluation of κ 2-β-diketonate and β-ketoesterate tungsten (vi) oxo-alkoxide complexes as precursors for chemical vapor deposition of WO x thin films RO Bonsu, DC Bock, H Kim, RY Korotkov, KA Abboud, TJ Anderson, ... Dalton Transactions 45 (27), 10897-10908, 2016 | 20 | 2016 |
Dioxo–Fluoroalkoxide Tungsten(VI) Complexes for Growth of WOx Thin Films by Aerosol-Assisted Chemical Vapor Deposition RO Bonsu, H Kim, C O’Donohue, RY Korotkov, KA Abboud, TJ Anderson, ... Inorganic Chemistry 54 (15), 7536-7547, 2015 | 16 | 2015 |
Synthesis of tungsten oxo fluoroalkoxide complexes WO (OR) 3L as precursors for growth of WOx nanomaterials by aerosol-assisted chemical vapor deposition DC Bock, NC Ou, RO Bonsu, CT Anghel, X Su, L McElwee-White Solid State Ionics 315, 77-84, 2018 | 11 | 2018 |
Effect of the Ligand Structure on Chemical Vapor Deposition of WNxCy Thin Films from Tungsten Nitrido Complexes of the Type WN(NR2)3 A Koley, CT O’Donohue, MM Nolan, KR McClain, RO Bonsu, RY Korotkov, ... Chemistry of Materials 27 (24), 8326-8336, 2015 | 10 | 2015 |
Tungsten oxide film and nanorods grown by aerosol-assisted chemical vapor deposition using κ2-β-diketonate and β-ketoesterate tungsten (VI) oxo-alkoxide precursors H Kim, RO Bonsu, DC Bock, NC Ou, RY Korotkov, L McElwee-White, ... ECS Journal of Solid State Science and Technology 5 (11), Q3095, 2016 | 9 | 2016 |
beta-Diketonate and beta-ketoesterate tungsten (VI) oxo-alkoxide precursors for chemical vapor deposition of WOx D Bock, R Bonsu, H Kim, T Anderson, L McElwee-White ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY 252, 2016 | | 2016 |
Thermal Decomposition of Tungsten Nitrido Precursors for Low Temperature MOCVD of WNxCy SY Kim, A Koley, R Bonsu, M Nolan, L McElwee-White, T Anderson ECS Transactions 69 (6), 101, 2015 | | 2015 |
Chemical vapor deposition of WOx for charge-injection applications RO Bonsu, H Kim, C O'Donohue, RY Korotkov, TJ Anderson, ... ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY 248, 2014 | | 2014 |
Journal Name RSCPublishing RO Bonsu, H Kim, C O'Donohue, RY Korotkov, KR McClain, KA Abboud, ... | | |
Electronic Supplementary Information for RO Bonsu, DC Bock, H Kim, RY Korotkov, KA Abboud, TJ Anderson, ... | | |