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Atilla C. Varga
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Synthesis, Structure, and Thermal Properties of Volatile Group 11 Triazenides as Potential Precursors for Vapor Deposition
R Samii, A Fransson, P Mpofu, P Niiranen, L Ojamäe, V Kessler, ...
Inorganic Chemistry 61 (51), 20804-20813, 2022
32022
Modified 3D-printed architectures: Effects of coating by alumina on acrylonitrile butadiene styrene
AC Varga, ST Barry
Journal of Vacuum Science & Technology A 40 (2), 2022
22022
Enhancing 3D Printed Substrates Using Atomic Layer Deposition
AC Varga
Carleton University, 2022
12022
Inherently Selective Atomic Layer Deposition for Optical and Sensor Applications: Microreactor Direct Atomic Layer Processing (μDALP™)
M Plakhotnyuk, AC Varga, K Parfeniukas, I Kundrata, J Bachmann
Electrochemical Society Meeting Abstracts 244, 1463-1463, 2023
2023
Multi Cycle and Material Deposition for Spatial Atomic Layer Deposition Process
AC Varga, M Carnoy, I Kundrata, M Plakhotnyuk, J Bachmann
2023 IEEE Nanotechnology Materials and Devices Conference (NMDC), 248-249, 2023
2023
Reversible alteration of 3D printed polymer properties via infiltration of alumina by atomic layer deposition
AC Varga, ST Barry
Journal of Vacuum Science & Technology A 41 (2), 2023
2023
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