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Wei-Ming Yeh
Wei-Ming Yeh
School of Chemical and Biomolecular Engineering, Georgia Institute of Technology
Verified email at intel.com
Title
Cited by
Cited by
Year
Amperometric detection of morphine based on poly (3, 4-ethylenedioxythiophene) immobilized molecularly imprinted polymer particles prepared by precipitation polymerization
KC Ho, WM Yeh, TS Tung, JY Liao
Analytica chimica acta 542 (1), 90-96, 2005
1702005
Amperometric morphine sensing using a molecularly imprinted polymer-modified electrode
WM Yeh, KC Ho
Analytica chimica acta 542 (1), 76-82, 2005
1222005
A microfluidic system utilizing molecularly imprinted polymer films for amperometric detection of morphine
CH Weng, WM Yeh, KC Ho, GB Lee
Sensors and Actuators B: Chemical 121 (2), 576-582, 2007
1182007
Comparison of positive tone versus negative tone resist pattern collapse behaviora)
WM Yeh, DE Noga, RA Lawson, LM Tolbert, CL Henderson
Journal of Vacuum Science & Technology B 28 (6), C6S6-C6S11, 2010
442010
A study of reactive adhesion promoters and their ability to mitigate pattern collapse in thin film lithography
WM Yeh, RA Lawson, LM Tolbert, CL Henderson
SPIE Advanced Lithography, 79721W-79721W-7, 2011
192011
PS-b-PHEMA: synthesis, characterization, and processing of a high χ polymer for directed self-assembly lithography
J Cheng, RA Lawson, WM Yeh, ND Jarnagin, LM Tolbert, CL Henderson
SPIE Advanced Lithography, 86801W-86801W-7, 2013
172013
Developing directly photodefinable substrate guiding layers for block copolymer directed self-assembly (DSA) patterning
J Cheng, RA Lawson, WM Yeh, LM Tolbert, CL Henderson
SPIE Advanced Lithography, 79722I-79722I-13, 2011
152011
Methods to explore and prevent pattern collapse in thin film lithography
DE Noga, WM Yeh, RA Lawson, LM Tolbert, CL Henderson
SPIE Advanced Lithography, 76392O-76392O-6, 2010
152010
PS-b-PHOST as a high χ block copolymers for directed self assembly: optimization of underlayer and solvent anneal processes
ND Jarnagin, WM Yeh, J Cheng, A Peters, RA Lawson, LM Tolbert, ...
SPIE Advanced Lithography, 86801X-86801X-10, 2013
112013
Directed self-assembly of poly (styrene)-block-poly (acrylic acid) copolymers for sub-20nm pitch patterning
J Cheng, RA Lawson, WM Yeh, ND Jarnagin, A Peters, LM Tolbert, ...
SPIE Advanced Lithography, 83232R-83232R-8, 2012
102012
Bond contribution model for the prediction of glass transition temperature in polyphenol molecular glass resists
RA Lawson, WM Yeh, CL Henderson
Journal of Vacuum Science & Technology B 27 (6), 3004-3009, 2009
92009
A comprehensive model and method for model parameterization for predicting pattern collapse behavior in photoresist nanostructures
WM Yeh, RA Lawson, CL Henderson
SPIE Advanced Lithography, 79721X-79721X-10, 2011
82011
Thin film buckling as a method to explore the effect of reactive rinse treatments on the mechanical properties of resist thin films
WM Yeh, DE Noga, RA Lawson, LM Tolbert, CL Henderson
SPIE Advanced Lithography, 76391I-76391I-6, 2010
82010
Investigation of high χ block copolymers for directed self-asssembly: synthesis and characterization of PS-b-PHOST
ND Jarnagin, J Cheng, A Peters, WM Yeh, RA Lawson, LM Tolbert, ...
SPIE Advanced Lithography, 832310-832310-9, 2012
72012
Pattern collapse in lithographic nanostructures: quantifying photoresist nanostructure behavior and novel methods for collapse mitigation
WM Yeh
Georgia Institute of Technology, 2013
52013
The use of surface modifiers to mitigate pattern collapse in thin film lithography
DE Noga, WM Yeh, RA Lawson, LM Tolbert, CL Henderson
SPIE Advanced Lithography, 76391H-76391H-6, 2010
42010
PS-b-PAA as a high χ polymer for directed self-assembly: a study of solvent and thermal annealing processes for PS-b-PAA
J Cheng, RA Lawson, WM Yeh, ND Jarnagin, LM Tolbert, CL Henderson
SPIE Advanced Lithography, 86801V-86801V-4, 2013
32013
Application of aziridine reactive rinses in a post-development process to reduce photoresist pattern collapse
WM Yeh, RA Lawson, LM Tolbert, CL Henderson
SPIE Advanced Lithography, 83251Y-83251Y-7, 2012
32012
Resist surface crosslinking using amine-based reactive rinses to mitagate pattern collapse in thin film lithography
WM Yeh, RA Lawson, LM Tolbert, CL Henderson
SPIE Advanced Lithography, 83251X-83251X-7, 2012
32012
The effect of drying rate on pattern collapse performance in thin film lithography
WM Yeh, RA Lawson, LM Tolbert, CL Henderson
SPIE Advanced Lithography, 79721Y-79721Y-8, 2011
12011
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