| Measurement of axial and transverse trapping stiffness of optical tweezers in air using a radially polarized beam M Michihata, T Hayashi, Y Takaya Applied optics 48 (32), 6143-6151, 2009 | 92 | 2009 |
| Development of the nano-probe system based on the laser-trapping technique M Michihata, Y Takaya, T Hayashi CIRP annals 57 (1), 493-496, 2008 | 75 | 2008 |
| Measurement of probe-stylus sphere diameter for micro-CMM based on spectral fingerprint of whispering gallery modes M Michihata, T Hayashi, A Adachi, Y Takaya CIRP annals 63 (1), 469-472, 2014 | 38 | 2014 |
| Chemical mechanical polishing of patterned copper wafer surface using water-soluble fullerenol slurry Y Takaya, H Kishida, T Hayashi, M Michihata, K Kokubo CIRP annals 60 (1), 567-570, 2011 | 29 | 2011 |
| Nano position sensing based on laser trapping technique for flat surfaces M Michihata, Y Takaya, T Hayashi Measurement Science and Technology 19 (8), 084013, 2008 | 25 | 2008 |
| Measurement of a tool wear profile using confocal fluorescence microscopy of the cutting fluid layer Y Takaya, K Maruno, M Michihata, Y Mizutani CIRP Annals-Manufacturing Technology 65, 2016 | 24 | 2016 |
| Probing technique using circular motion of a microsphere controlled by optical pressure for a nanocoordinate measuring machine M Michihata, Y Nagasaka, T Hayashi, Y Takaya Applied optics 48 (2), 198-205, 2009 | 22 | 2009 |
| Microdisplacement sensor using an optically trapped microprobe based on the interference scale M Michihata, T Hayashi, D Nakai, Y Takaya Review of Scientific Instruments 81 (1), 2010 | 20 | 2010 |
| Surface-sensing principle of microprobe system for micro-scale coordinate metrology: a review M Michihata Metrology 2 (1), 46-72, 2022 | 15 | 2022 |
| Fundamental Study on Novel On-Machine Measurement Method of a Cutting Tool Edge Profile with a Fluorescent Confocal Microscopy K Maruno, M Michihata, Y Mizutani, Y Takaya International Journal of Automation Technology 10 (1), 106-113, 2016 | 15 | 2016 |
| Surface analysis of the chemical polishing process using a fullerenol slurry by Raman spectroscopy under surface plasmon excitation Y Takaya, M Michihata, T Hayashi, R Murai, K Kano CIRP Annals 62 (1), 571-574, 2013 | 14 | 2013 |
| New technique for single-beam gradient-force laser trapping in air M Michihata, T Yoshikane, T Hayashi, Y Takaya International Journal of Optomechatronics 7 (1), 46-59, 2013 | 13 | 2013 |
| Fabrication of nano/micro dual-periodic structures by multi-beam evanescent wave interference lithography using spatial beats S Masui, Y Torii, M Michihata, K Takamasu, S Takahashi Optics express 27 (22), 31522-31531, 2019 | 12 | 2019 |
| Theoretical model of a subwavelength grating polarization beam splitter S Masui, S Kadoya, M Michihata, S Takahashi Applied Optics 59 (30), 9469-9475, 2020 | 11 | 2020 |
| Surface Imaging Technique by an Optically Trapped Microsphere in Air Condition M Michihata, J Kim, S Takahashi, K Takamasu, Y Mizutani, Y Takaya Nanomanufacturing and Metrology 1 (1), 32-38, 2018 | 11 | 2018 |
| Theoretical analyses of in-process depth measurements of fine microgrooves based on near-field optical response S Takahashi, C Jin, S Ye, M Michihata, K Takamasu CIRP annals 66 (1), 503-506, 2017 | 11 | 2017 |
| Sensing a vertical surface by measuring a fluorescence signal using a confocal optical system M Michihata, A Fukui, T Hayashi, Y Takaya Measurement Science and Technology 25 (6), 064004, 2014 | 11 | 2014 |
| Scanning type microprobe for displacement measurement based on standing wave detection using an optically trapped particle Y Takaya, M Michihata, T Hayashi International Journal of Automation Technology 5 (3), 395-402, 2011 | 11 | 2011 |
| Radial mode number identification on whispering gallery mode resonances for diameter measurement of microsphere Y Kobayashi, M Michihata, Z Zhao, B Chu, K Takamasu, S Takahashi Measurement Science and Technology 30 (6), 065201, 2019 | 10 | 2019 |
| Evanescent light exposing system under nitrogen purge for nano-stereolithography Y Suzuki, H Tahara, M Michihata, K Takamasu, S Takahashi Procedia CIRP 42, 77-80, 2016 | 9 | 2016 |
Kiyoshi TakamasuProfessor Emeritus, Department of Precision Engineering, The University of TokyoVerified email at pe.t.u-tokyo.ac.jp
