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Benoit Hamelin
Benoit Hamelin
Post-doctoral fellow at Georgia Institute of Technology, Atlanta, USA
Verified email at gatech.edu - Homepage
Title
Cited by
Cited by
Year
Monocrystalline silicon carbide disk resonators on phononic crystals with ultra-low dissipation bulk acoustic wave modes
B Hamelin, J Yang, A Daruwalla, H Wen, F Ayazi
Scientific reports 9 (1), 18698, 2019
332019
Localized eutectic trimming of polysilicon microhemispherical resonating gyroscopes
B Hamelin, V Tavassoli, F Ayazi
IEEE Sensors Journal 14 (10), 3498-3505, 2014
212014
A study of mode-matching and alignment in piezoelectric disk resonator gyros via femtosecond laser ablation
Z Liu, A Daruwalla, B Hamelin, F Ayazi
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021
152021
High-Q monocrystalline silicon carbide disk resonators fabricated using DRIE of thick SiC-on-insulator substrates
B Hamelin, SD Ko, J Yang, F Ayazi
14*2018
Investigating Elastic Anisotropy of 4H-SiC Using Ultra-High Q Bulk Acoustic Wave Resonators
J Yang, B Hamelin, F Ayazi
Journal of Microelectromechanical Systems 29 (6), 1473-1482, 2020
132020
Capacitive Lamé Mode Resonators in -Thick Monocrystalline Silicon Carbide with Q-Factors Exceeding 20 Million
J Yang, B Hamelin, F Ayazi
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems …, 2020
132020
Eutectic trimming of polysilicon micro hemispherical resonating Gyroscope
B Hamelin, V Tavassoli, F Ayazi
SENSORS, 2013 IEEE, 1-4, 2013
112013
High-aspect-ratio sub-micron trench etching on SOI using wet metal-assisted chemical etching (MaCE) process
B Hamelin, L Li, A Daruwalla, CP Wong, F Ayazi
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems …, 2016
102016
Microscale pierced shallow shell resonators: A test vehicle to study surface loss
B Hamelin, V Tavassoli, F Ayazi
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017
92017
Monocrystalline 4H silicon carbide-on-insulator substrates for Nav-Grade planar BAW gyroscopes
B Hamelin, J Yang, Z Liu, F Ayazi
2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2021
82021
Stiffness trimming of high Q MEMS resonators by excimer laser annealing of germanium thin film on silicon
B Hamelin, A Daruwalla, F Ayazi
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems …, 2016
82016
Precision deep reactive ion etching of monocrystalline 4H-SiCOI for bulk acoustic wave resonators with ultra-low dissipation
B Hamelin, J Yang, F Ayazi
Journal of the Electrochemical Society 168 (1), 017512, 2021
72021
ULTRA-HIGH Q MONOCRYSTALLINE SILICON CARBIDE DISK RESONATORS ANCHORED UPON A PHONONIC CRYSTAL
J Yang, B Hamelin, S Ko, F Ayazi
2018 Solid State Sensor, Actuator Microsystems Work, 83-86, 2018
72018
Substrate-decoupled 3D micro-shell resonators
V Tavassoli, B Hamelin, F Ayazi
2016 IEEE SENSORS, 1-3, 2016
62016
Highly-symmetric silicon dioxide shallow shell resonators with angstrom-level roughness
B Hamelin, V Tavassoli, F Ayazi
2015 IEEE SENSORS, 1-4, 2015
62015
nano-precision deep reactive ion etching of monocrystalline 4H-SiCOI for bulk acoustic wave resonators with ultra-low dissipation
F Ayazi, B Hamelin, J Yang
ECS Transactions 97 (4), 3, 2020
52020
Method for frequency trimming a microelectromechanical resonator
B Hamelin, F Ayazi
US Patent 10,947,111, 2021
12021
Acoustically Decoupled MEMS Devices
F Ayazi, B Hamelin, J Yang
US Patent App. 18/451,675, 2024
2024
Acoustically decoupled MEMS devices
F Ayazi, B Hamelin, J Yang
US Patent 11,777,468, 2023
2023
Progress towards chip-scale transverse laser cooling of thermal atomic beams
C Li, B Hamelin, F Ayazi, C Raman
Bulletin of the American Physical Society 66, 2021
2021
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