Monocrystalline silicon carbide disk resonators on phononic crystals with ultra-low dissipation bulk acoustic wave modes B Hamelin, J Yang, A Daruwalla, H Wen, F Ayazi Scientific reports 9 (1), 18698, 2019 | 33 | 2019 |
Localized eutectic trimming of polysilicon microhemispherical resonating gyroscopes B Hamelin, V Tavassoli, F Ayazi IEEE Sensors Journal 14 (10), 3498-3505, 2014 | 21 | 2014 |
A study of mode-matching and alignment in piezoelectric disk resonator gyros via femtosecond laser ablation Z Liu, A Daruwalla, B Hamelin, F Ayazi 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems …, 2021 | 15 | 2021 |
High-Q monocrystalline silicon carbide disk resonators fabricated using DRIE of thick SiC-on-insulator substrates B Hamelin, SD Ko, J Yang, F Ayazi | 14* | 2018 |
Investigating Elastic Anisotropy of 4H-SiC Using Ultra-High Q Bulk Acoustic Wave Resonators J Yang, B Hamelin, F Ayazi Journal of Microelectromechanical Systems 29 (6), 1473-1482, 2020 | 13 | 2020 |
Capacitive Lamé Mode Resonators in -Thick Monocrystalline Silicon Carbide with Q-Factors Exceeding 20 Million J Yang, B Hamelin, F Ayazi 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems …, 2020 | 13 | 2020 |
Eutectic trimming of polysilicon micro hemispherical resonating Gyroscope B Hamelin, V Tavassoli, F Ayazi SENSORS, 2013 IEEE, 1-4, 2013 | 11 | 2013 |
High-aspect-ratio sub-micron trench etching on SOI using wet metal-assisted chemical etching (MaCE) process B Hamelin, L Li, A Daruwalla, CP Wong, F Ayazi 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems …, 2016 | 10 | 2016 |
Microscale pierced shallow shell resonators: A test vehicle to study surface loss B Hamelin, V Tavassoli, F Ayazi 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017 | 9 | 2017 |
Monocrystalline 4H silicon carbide-on-insulator substrates for Nav-Grade planar BAW gyroscopes B Hamelin, J Yang, Z Liu, F Ayazi 2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2021 | 8 | 2021 |
Stiffness trimming of high Q MEMS resonators by excimer laser annealing of germanium thin film on silicon B Hamelin, A Daruwalla, F Ayazi 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems …, 2016 | 8 | 2016 |
Precision deep reactive ion etching of monocrystalline 4H-SiCOI for bulk acoustic wave resonators with ultra-low dissipation B Hamelin, J Yang, F Ayazi Journal of the Electrochemical Society 168 (1), 017512, 2021 | 7 | 2021 |
ULTRA-HIGH Q MONOCRYSTALLINE SILICON CARBIDE DISK RESONATORS ANCHORED UPON A PHONONIC CRYSTAL J Yang, B Hamelin, S Ko, F Ayazi 2018 Solid State Sensor, Actuator Microsystems Work, 83-86, 2018 | 7 | 2018 |
Substrate-decoupled 3D micro-shell resonators V Tavassoli, B Hamelin, F Ayazi 2016 IEEE SENSORS, 1-3, 2016 | 6 | 2016 |
Highly-symmetric silicon dioxide shallow shell resonators with angstrom-level roughness B Hamelin, V Tavassoli, F Ayazi 2015 IEEE SENSORS, 1-4, 2015 | 6 | 2015 |
nano-precision deep reactive ion etching of monocrystalline 4H-SiCOI for bulk acoustic wave resonators with ultra-low dissipation F Ayazi, B Hamelin, J Yang ECS Transactions 97 (4), 3, 2020 | 5 | 2020 |
Method for frequency trimming a microelectromechanical resonator B Hamelin, F Ayazi US Patent 10,947,111, 2021 | 1 | 2021 |
Acoustically Decoupled MEMS Devices F Ayazi, B Hamelin, J Yang US Patent App. 18/451,675, 2024 | | 2024 |
Acoustically decoupled MEMS devices F Ayazi, B Hamelin, J Yang US Patent 11,777,468, 2023 | | 2023 |
Progress towards chip-scale transverse laser cooling of thermal atomic beams C Li, B Hamelin, F Ayazi, C Raman Bulletin of the American Physical Society 66, 2021 | | 2021 |