| Dual chamber valveless MEMS micropump F Amirouche, E Zordan US Patent 8,308,452, 2012 | 72 | 2012 |
| Principle design and actuation of a dual chamber electromagnetic micropump with coaxial cantilever valves E Zordan, F Amirouche, Y Zhou Biomedical microdevices 12, 55-62, 2010 | 37 | 2010 |
| Methods and apparatus for measuring aspiration pressure E Zordan US Patent 9,915,674, 2018 | 18 | 2018 |
| Design and analysis of a double superimposed chamber valveless MEMS micropump E Zordan, F Amirouche Proceedings of the Institution of Mechanical Engineers, Part H: Journal of …, 2007 | 9 | 2007 |
| Reticle clamping system E Zordan US Patent 9,274,439, 2016 | 6 | 2016 |
| System and method for design of linear motor for vacuum environment E Zordan US Patent 8,885,148, 2014 | 6 | 2014 |
| Reticle support that reduces reticle slippage SE Del Puerto, E Zordan US Patent 9,229,341, 2016 | 4 | 2016 |
| Reticle clamping device E Zordan, BA Evans, DN Burbank, AR Baheti, SA Nayfeh US Patent 10,761,435, 2020 | | 2020 |
| Lithographic apparatus with an object support having actuating structures to apply a force and method for operating the same E Zordan US Patent 9,335,621, 2016 | | 2016 |
| Design, analysis and testing of an electromagnetically actuated double chamber micropump. E Zordan University of Illinois at Chicago, 2007 | | 2007 |
| Design and Analysis of a Double Superimposed Chamber MEMS Micropump E Zordan, F Amirouche ASME International Mechanical Engineering Congress and Exposition 4224, 279-286, 2005 | | 2005 |
| Model and Analysis of a MEMS Micropump E Zordan University of Illinois at Chicago, 2004 | | 2004 |
