Optical inspection of Microsystems W Osten, A Duparre, C Furlong, I De Wolf, A Asundi, K Korner, D Vogel, ...
CRC press, 2018
233 2018 Measurement system for full three-dimensional motion characterization of MEMS C Rembe, RS Muller
Journal of Microelectromechanical Systems 11 (5), 479-488, 2002
158 2002 Optical measurement methods to study dynamic behavior in MEMS C Rembe, R Kant, RS Muller
Microsystems Engineering: Metrology and Inspection 4400, 127-137, 2001
142 2001 Fluidic self-assembly of micromirrors onto microactuators using capillary forces U Srinivasan, MA Helmbrecht, C Rembe, RS Muller, RT Howe
IEEE Journal of Selected Topics in Quantum Electronics 8 (1), 4-11, 2002
128 2002 Micromirrors for adaptive-optics arrays MA Helmbrecht, U Srinivasan, C Rembe, RT Howe, RS Muller
Transducers’ 01 Eurosensors XV: The 11th International Conference on Solid …, 2001
80 2001 Measuring MEMS in motion by laser Doppler vibrometry C Rembe, G Siegmund, H Steger, M Wörtge
Optical Inspection of Microsystems, Second Edition, 297-347, 2019
79 2019 Analysis of the dynamics in microactuators using high-speed cine photomicrography C Rembe, B Tibken, EP Hofer
Journal of Microelectromechanical Systems 10 (1), 137-145, 2001
67 2001 Laser-scanning confocal vibrometer microscope: Theory and experiments C Rembe, A Dräbenstedt
Review of scientific instruments 77 (8), 2006
60 2006 Thermal ink jet dynamics: modeling, simulation, and testing C Rembe, S aus der Wiesche, EP Hofer
Microelectronics Reliability 40 (3), 525-532, 2000
56 2000 Full three-dimensional motion characterization of a gimballed electrostatic microactuator C Rembe, L Muller, RS Muller, RT Howe
2001 IEEE International Reliability Physics Symposium Proceedings. 39th …, 2001
51 2001 Integrated optical frequency shifter in silicon-organic hybrid (SOH) technology M Lauermann, C Weimann, A Knopf, W Heni, R Palmer, S Koeber, ...
Optics express 24 (11), 11694-11707, 2016
49 2016 Heterodyne laser-Doppler vibrometer with a slow-shear-mode Bragg cell for vibration measurements up to 1.2 GHz C Rembe, S Boedecker, A Dräbenstedt, F Pudewills, G Siegmund
Eighth International Conference on Vibration Measurements by Laser …, 2008
41 2008 High-speed visualization, a powerful diagnostic tool for microactuators–retrospect and prospect P Krehl, S Engemann, C Rembe, EP Hofer
Microsystem Technologies 5, 113-132, 1999
41 1999 How accurate is optical second-harmonic generation? R Wynands, O Coste, C Rembe, D Meschede
Optics letters 20 (10), 1095-1097, 1995
38 1995 Fluidic self-assembly of micromirrors onto surface micromachined actuators U Srinivasan, M Helmbrecht, C Rembe, RS Muller, RT Howe
2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No. 00EX399 …, 2000
37 2000 Remote-sensing vibrometry at 1550 nm wavelength A Dräbenstedt, J Sauer, C Rembe
AIP conference proceedings 1457 (1), 113-121, 2012
35 2012 Real-cinematographic visualization of droplet ejection in thermal ink jets C Rembe, J Patzer, EP Hofer, P Krehl
Color Imaging: Device-Independent Color, Color Hard Copy, and Graphic Arts …, 1996
33 1996 Optical three-dimensional vibrometer microscope with picometer-resolution in C Rembe, R Kowarsch, W Ochs, A Dräbenstedt, M Giesen, M Winter
Optical Engineering 53 (3), 034108-034108, 2014
30 2014 The problem of calibrating laser-Doppler vibrometers at high frequencies M Winter, H Füser, M Bieler, G Siegmund, C Rembe
AIP Conference Proceedings 1457 (1), 165-175, 2012
28 2012 Boiling of superheated liquids near the spinodal: I General theory S Aus der Wiesche, C Rembe, EP Hofer
Heat and mass transfer 35 (1), 25-31, 1999
28 1999 
Richard S. Mullerprofessor of eecs university of california berkeleyBestätigte E-Mail-Adresse bei eecs.berkeley.edu
