Follow
Jennifer Braggin
Jennifer Braggin
Entegris, Inc.
Verified email at alum.lehigh.edu - Homepage
Title
Cited by
Cited by
Year
Method and system for optimizing operation of a pump
PJ Magoon, RA Ramirez, JM Braggin
US Patent 8,727,744, 2014
272014
Analysis of the effect of point-of-use filtration on microbridging defectivity
J Braggin, R Gronheid, S Cheng, D Van Den Heuvel, S Bernard, ...
Advances in Resist Materials and Processing Technology XXVI 7273, 229-238, 2009
122009
Method and system for pump priming
JM Braggin, S Inui, W Chow, A Wu
US Patent 9,297,374, 2016
82016
Customizable dispense system with smart controller
J Cedrone, I Gashgaee, PJ Magoon, JM Braggin, GL Gonnella, JO Vail
US Patent App. 13/805,601, 2013
62013
A review of retention efficiency measurement techniques for sub-30 nm liquid filtration
S Liu, H Zhang, J Braggin
Solid State Technology 55 (8), 27-30, 2012
62012
Defect performance of a 2X node resist with a revolutionary point-of-use filter
J Braggin, R Ramirez, A Wu, W Choi, I Funahshi, K Yamamoto
Advances in Resist Materials and Processing Technology XXVII 7639, 432-439, 2010
52010
Impact of using filtration on global and local uniformity of spin on glue materials
S Bernard, RA Miller, V Pepper, J Braggin, FFC Duval
Micromachining and Microfabrication Process Technology XVI 7926, 99-107, 2011
42011
Lithography cost savings through resist reduction and monitoring program
T Couteau, S Lindauer, C Stewart, J Braggin, B Bjornberg
2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, 1-4, 2011
32011
Point-of-use filtration methods to reduce defectivity
J Braggin, W Schoallert, K Hoshiko, X Buch
Advances in Resist Materials and Processing Technology XXVII 7639, 388-396, 2010
32010
Preventing Lithography-Induced Maverick Yield Events With A Dispense System Advanced Equipment Control Method
J Braggin
2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, 31-36, 2008
32008
Strategy for yield improvement with sub-10nm photochemical filtration
J Braggin, C Brodsky, M Linnane, P Klymko
Advances in Resist Materials and Processing Technology XXX 8682, 551-557, 2013
22013
Characterization of filter performance on contact-hole defectivity
J Braggin, N Vitorino, V Monreal, J Zook
Advances in Resist Materials and Processing Technology XXVIII 7972, 820-829, 2011
22011
Improving material-specific dispense processes for low-defect coatings
N Brakensiek, J Braggin, J Berron, R Ramirez, K Anderson, B Smith
Advances in Resist Materials and Processing Technology XXVIII 7972, 830-836, 2011
22011
IMPROVING ADVANCED LITHOGRAPHY PROCESS DEFECTIVITY WITH A HIGHLY RETENTIVE 5 NM ASYMMETRIC UPE FILTER
A Wu, J Braggin
Application Note Entegris Inc, 2009
22009
Addressing Weak Links in Automotive Reliability Semiconductor Contamination Control, Inspection and Test
A Aal, J Braggin, A Amade, M Puttock
2020 IEEE International Integrated Reliability Workshop (IIRW), 1-4, 2020
12020
Expanding the lithographer's toolkit to reduce variability: filtration considerations
V Goel, A Wu, J Braggin
Advances in Patterning Materials and Processes XXXVI 10960, 133-143, 2019
12019
Characterization of the CIGS Solar Cell System in the FIB-SEM Laboratory
F Pérez-Willard, J Braggin, TM Friedlmeier
Microscopy and Microanalysis 24 (S1), 848-849, 2018
12018
Further analysis of the effect of point-of-use filtration on microbridging defectivity
J Braggin, R Gronheid, S Cheng, D Van den Heuvel, S Bernard, ...
Advances in Resist Materials and Processing Technology XXVII 7639, 379-387, 2010
12010
Method and system for optimizing operation of a pump
PJ Magoon, RA Ramirez, JM Braggin
2019
Guest Editorial Special Section on the 2015 SEMI Advanced Semiconductor Manufacturing Conference
P Werbaneth, J Braggin, E Eisenbraun, S Radloff, C Weber
IEEE Transactions on Semiconductor Manufacturing 29 (4), 271-274, 2016
2016
The system can't perform the operation now. Try again later.
Articles 1–20