Follow
Lukas Janavicius
Lukas Janavicius
Verified email at illinois.edu - Homepage
Title
Cited by
Cited by
Year
Producing silicon carbide micro and nanostructures by plasma‐free metal‐assisted chemical etching
JA Michaels, L Janavicius, X Wu, C Chan, HC Huang, S Namiki, M Kim, ...
Advanced Functional Materials 31 (32), 2103298, 2021
272021
Self-assembled microtubular electrodes for on-chip low-voltage electrophoretic manipulation of charged particles and macromolecules
A Khandelwal, N Athreya, MQ Tu, LL Janavicius, Z Yang, O Milenkovic, ...
Microsystems & nanoengineering 8 (1), 27, 2022
112022
Programmable vapor-phase metal-assisted chemical etching for versatile high-aspect ratio silicon nanomanufacturing
LL Janavicius, JA Michaels, C Chan, DJ Sievers, X Li
Applied Physics Reviews 10 (1), 2023
102023
Publisher's Note:“Programmable vapor-phase metal-assisted chemical etching for versatile high-aspect ratio silicon nanomanufacturing”[Appl. Phys. Rev. 10, 011409 (2023)]
LL Janavicius, JA Michaels, C Chan, DJ Sievers, X Li
Applied Physics Reviews 10 (2), 029901, 2023
2023
Methods and systems for large area and low defect monolayer ordering of microspheres and nanospheres
D Sievers, S Grewal, L Janavicius, J Michaels
US Patent App. 17/558,996, 2022
2022
Catalyst-assisted chemical etching with a vapor-phase etchant
DJ Sievers, X Li, JD Kim, L Janavicius
2020
Catalyst-assisted chemical etching with a vapor-phase etchant
X Li, DJ Sievers, L Janavicius, JD Kim
US Patent 10,748,781, 2020
2020
The system can't perform the operation now. Try again later.
Articles 1–7