Producing silicon carbide micro and nanostructures by plasma‐free metal‐assisted chemical etching JA Michaels, L Janavicius, X Wu, C Chan, HC Huang, S Namiki, M Kim, ... Advanced Functional Materials 31 (32), 2103298, 2021 | 27 | 2021 |
Self-assembled microtubular electrodes for on-chip low-voltage electrophoretic manipulation of charged particles and macromolecules A Khandelwal, N Athreya, MQ Tu, LL Janavicius, Z Yang, O Milenkovic, ... Microsystems & nanoengineering 8 (1), 27, 2022 | 11 | 2022 |
Programmable vapor-phase metal-assisted chemical etching for versatile high-aspect ratio silicon nanomanufacturing LL Janavicius, JA Michaels, C Chan, DJ Sievers, X Li Applied Physics Reviews 10 (1), 2023 | 10 | 2023 |
Publisher's Note:“Programmable vapor-phase metal-assisted chemical etching for versatile high-aspect ratio silicon nanomanufacturing”[Appl. Phys. Rev. 10, 011409 (2023)] LL Janavicius, JA Michaels, C Chan, DJ Sievers, X Li Applied Physics Reviews 10 (2), 029901, 2023 | | 2023 |
Methods and systems for large area and low defect monolayer ordering of microspheres and nanospheres D Sievers, S Grewal, L Janavicius, J Michaels US Patent App. 17/558,996, 2022 | | 2022 |
Catalyst-assisted chemical etching with a vapor-phase etchant DJ Sievers, X Li, JD Kim, L Janavicius | | 2020 |
Catalyst-assisted chemical etching with a vapor-phase etchant X Li, DJ Sievers, L Janavicius, JD Kim US Patent 10,748,781, 2020 | | 2020 |