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Anatoly Muchnikov
Anatoly Muchnikov
TAE Technologies
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Novel microwave plasma‐assisted CVD reactor for diamond delta doping
AL Vikharev, AM Gorbachev, MA Lobaev, AB Muchnikov, DB Radishev, ...
physica status solidi (RRL)–Rapid Research Letters 10 (4), 324-327, 2016
602016
Homoepitaxial single crystal diamond growth at different gas pressures and MPACVD reactor configurations
AB Muchnikov, AL Vikharev, AM Gorbachev, DB Radishev, VD Blank, ...
Diamond and related materials 19 (5-6), 432-436, 2010
582010
Experimental study of hydrogen plasma etching of (1 0 0) single crystal diamond in a MPACVD reactor
OA Ivanov, AB Muchnikov, VV Chernov, SA Bogdanov, AL Vikharev, ...
Materials Letters 151, 115-118, 2015
472015
Microcrystalline diamond growth in presence of argon in millimeter-wave plasma-assisted CVD reactor
AL Vikharev, AM Gorbachev, AV Kozlov, DB Radishev, AB Muchnikov
Diamond and related materials 17 (7-10), 1055-1061, 2008
402008
Nanometric diamond delta doping with boron
JE Butler, A Vikharev, A Gorbachev, M Lobaev, A Muchnikov, ...
physica status solidi (RRL)–Rapid Research Letters 11 (1), 1600329, 2017
382017
Homoepitaxial growth of CVD diamond after ICP pretreatment
AB Muchnikov, AL Vikharev, JE Butler, VV Chernov, VA Isaev, ...
physica status solidi (a) 212 (11), 2572-2577, 2015
352015
Growth‐rate Enhancement of High‐quality, Low‐loss CVD‐produced Diamond Disks Grown for Microwave Windows Application
S Bogdanov, A Vikharev, A Gorbachev, A Muchnikov, D Radishev, ...
Chemical Vapor Deposition 20 (1-2-3), 32-38, 2014
322014
Characterization of interfaces in mosaic CVD diamond crystal
AB Muchnikov, DB Radishev, AL Vikharev, AM Gorbachev, AV Mitenkin, ...
Journal of Crystal Growth 442, 62-67, 2016
282016
Comparative study of homoepitaxial single crystal diamond growth at continuous and pulsed mode of MPACVD reactor operation
AB Muchnikov, AL Vikharev, AM Gorbachev, DB Radishev
Diamond and related materials 20 (8), 1225-1228, 2011
272011
Investigation of the optimized parameters of microwave plasma-assisted chemical vapour deposition reactor operation in a pulsed mode
AL Vikharev, AM Gorbachev, AB Muchnikov, DB Radishev, ...
Journal of Physics D: Applied Physics 45 (39), 395202, 2012
212012
Combined single-crystalline and polycrystalline CVD diamond substrates for diamond electronics
AL Vikharev, AM Gorbachev, MP Dukhnovsky, AB Muchnikov, ...
Semiconductors 46, 263-266, 2012
162012
A wafer of combined single-crystalline and polycrystalline CVD diamond
AB Muchnikov, AL Vikharev, DB Radishev, VA Isaev, ОА Ivanov, ...
Materials Letters 139, 1-3, 2015
132015
Homoepitaxial single crystal diamond grown on natural diamond seeds (type IIa) with boron-implanted layer demonstrating the highest mobility of 1150 cm2/V s at 300 K for ion …
AK Ratnikova, MP Dukhnovsky, YY Fedorov, VE Zemlyakov, ...
Diamond and related materials 20 (8), 1243-1245, 2011
122011
Study of microwave plasma-assisted chemical vapor deposition of poly-and single-crystalline diamond films
AL Vikharev, AM Gorbachev, AB Muchnikov, DB Radishchev
Radiophysics and Quantum Electronics 50, 913-921, 2007
102007
Characterization of single-crystal diamond grown from the vapor phase on substrates of natural diamond
AA Altukhov, AL Vikharev, AM Gorbachev, MP Dukhnovsky, ...
Semiconductors 45, 392-396, 2011
92011
Study of grown single crystal diamond by optical and X-ray spectroscopy
DB Radishev, AL Vikharev, AM Gorbachev, AB Muchnikov, PA Yunin, ...
EPJ Web of Conferences 149, 02029, 2017
72017
Hydrocarbon plasma chemistry in a continuous microwave discharge
AM Gorbachev, AB Muchnikov, AL Vikharev, DB Radishchev, ...
Plasma Physics Reports 33, 871-879, 2007
52007
Formation of singular (001) terraces on the surface of single-crystal HPHT diamond substrates
PA Yunin, YN Drozdov, VV Chernov, VA Isaev, SA Bogdanov, ...
Semiconductors 50, 1622-1625, 2016
32016
Atomic composition and electrical characteristics of epitaxial CVD diamond layers doped with boron
EA Surovegina, EV Demidov, MN Drozdov, AV Murel, OI Khrykin, ...
Semiconductors 50, 1569-1573, 2016
22016
Materials and configurations for protection of objective materials
SV Daniel Marshall, Anatoly MUCHNIKOV
2022
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