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Sonal Dey, Ph.D.
Sonal Dey, Ph.D.
Intel Corporation
Verified email at kent.edu
Title
Cited by
Cited by
Year
Nonsymmetric bent-core liquid crystals based on a 1, 3, 4-thiadiazole core unit and their nematic mesomorphism
J Seltmann, A Marini, B Mennucci, S Dey, S Kumar, M Lehmann
Chemistry of Materials 23 (10), 2630-2636, 2011
742011
Soft elasticity in main chain liquid crystal elastomers
S Dey, DM Agra-Kooijman, W Ren, PJ McMullan, AC Griffin, S Kumar
Crystals 3 (2), 363-390, 2013
652013
Surface Oxidation of the Topological Insulator Bi2Se3
AJ Green, S Dey, YQ An, B O'Brien, SJ O'Mullane, B Thiel, AC Diebold
Journal of Vacuum Science and Technology A 34, 061403, 2016
622016
Origin of weak layer contraction in de Vries smectic liquid crystals
DM Agra-Kooijman, HG Yoon, S Dey, S Kumar
Physical Review E 89 (3), 032506, 2014
352014
Role of Ge and Si substrates in higher-k tetragonal phase formation and interfacial properties in cyclical atomic layer deposition-anneal Hf1− xZrxO2/Al2O3 thin film stacks
S Dey, K Tapily, S Consiglio, RD Clark, CS Wajda, GJ Leusink, AR Woll, ...
Journal of Applied Physics 120 (12), 2016
242016
Atomic layer deposited ultra-thin metal nitride barrier layers for ruthenium interconnect applications
S Dey, KH Yu, S Consiglio, K Tapily, T Hakamata, CS Wajda, GJ Leusink, ...
Journal of Vacuum Science & Technology A 35, 03E109, 2017
222017
Synthesis, characterization, and ecotoxicity of CeO2 nanoparticles with differing properties
B Alam, A Philippe, RR Rosenfeldt, F Seitz, S Dey, M Bundschuh, ...
Journal of Nanoparticle Research 18, 1-10, 2016
172016
Novel highly ordered core–shell nanoparticles
S Dey, MD Hossain, RA Mayanovic, R Wirth, RA Gordon
Journal of Materials Science, 1-11, 2016
162016
On-demand CMOS-compatible fabrication of ultrathin self-aligned SiC nanowire arrays
N Tabassum, M Kotha, V Kaushik, B Ford, S Dey, E Crawford, V Nikas, ...
Nanomaterials 8 (11), 906, 2018
142018
Room-temperature ferromagnetism in Ni (ii)-chromia based core–shell nanoparticles: experiment and first principles calculations
MD Hossain, RA Mayanovic, S Dey, R Sakidja, M Benamara
Physical Chemistry Chemical Physics 20 (15), 10396-10406, 2018
132018
Studies of the mechanical and extreme hydrothermal properties of periodic mesoporous silica and aluminosilica materials
DG Kizzire, S Dey, RA Mayanovic, R Sakidja, K Landskron, M Mandal, ...
Microporous and Mesoporous Materials 252, 69-78, 2017
132017
Structural and Magnetic Properties of Well-Ordered Inverted Core-Shell α-Cr2O3/ α-MxCr2-xO3 (M=Co, Ni, Mn, Fe) Nanoparticles
MD Hossain, S Dey, RA Mayanovic, M Benamara
MRS Advances, 1-6, 2016
102016
Mueller matrix spectroscopic ellipsometry based scatterometry simulations of Si and Si/SixGe1-x/Si/SixGe1-x/Si fins for sub-7nm node gate-all-around transistor metrology
S Dey, A Diebold, N Keller, M Korde
Metrology, Inspection, and Process Control for Microlithography XXXII 10585 …, 2018
92018
In Situ Ramp Anneal X-ray Diffraction Study of Atomic Layer Deposited Ultrathin TaN and Ta1-xAlxNy Films for Cu Diffusion Barrier Applications
S Consiglio, S Dey, K Yu, K Tapily, RD Clark, T Hasegawa, CS Wajda, ...
ECS Journal of Solid State Science and Technology 5 (9), P509, 2016
82016
Atomic layer deposition of ultrathin TaN and ternary Ta1-xAlxNy films for Cu diffusion barrier applications in advanced interconnects
S Consiglio, K Yu, S Dey, K Tapily, RD Clark, T Hasegawa, CS Wajda, ...
ECS Transactions 69 (7), 181, 2015
72015
Characterization of overlay and tilt in advanced technology nodes using scatterometry
D Dixit, S Dey, T Kagalwala, P Timoney, Y Ramnath, A Elia, N Paranjape, ...
2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC …, 2019
62019
Experimental and theoretical investigation of a mesoporous KxWO3 material having superior mechanical strength
S Dey, ST Anderson, RA Mayanovic, R Sakidja, K Landskron, B Kokoszka, ...
Nanoscale 8, 2937-2943, 2016
62016
Higher-k Tetragonal Phase Stabilization in Atomic Layer Deposited Hf1-xZrxO2 (0<x<1) Thin Films on Al2O3 Passivated Epitaxial-Ge
S Dey, K Tapily, S Consiglio, KH Yu, RD Clark, CS Wajda, GJ Leusink, ...
MRS Advances 1 (04), 269-274, 2016
52016
Investigations of the Mechanical and Hydrothermal Stabilities of SBA-15 and Al-SBA-15 Mesoporous Materials
DG Kizzire, S Dey, H Osman, RA Mayanovic, R Sakidja, Z Wang, ...
MRS Advances, 1-6, 2016
32016
Ferroelectric HfZrO films: Process, characterization and devices
RD Clark
ECSarXiv, 2018
22018
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