| A miniature electrothermal thruster using microwave-excited plasmas: a numerical design consideration Y Takao, K Ono Plasma Sources Science and Technology 15 (2), 211, 2006 | 78 | 2006 |
| A miniature electrothermal thruster using microwave-excited microplasmas: Thrust measurement and its comparison with numerical analysis Y Takao, K Eriguchi, K Ono Journal of Applied Physics 101 (12), 2007 | 64 | 2007 |
| Three-dimensional particle-in-cell simulation of a miniature plasma source for a microwave discharge ion thruster Y Takao, H Koizumi, K Komurasaki, K Eriguchi, K Ono Plasma sources science and technology 23 (6), 064004, 2014 | 57 | 2014 |
| Structural and electrical characterization of HBr/O2 plasma damage to Si substrate M Fukasawa, Y Nakakubo, A Matsuda, Y Takao, K Eriguchi, K Ono, ... Journal of Vacuum Science & Technology A 29 (4), 2011 | 55 | 2011 |
| Optical and electrical characterization of hydrogen-plasma-damaged silicon surface structures and its impact on in-line monitoring Y Nakakubo, A Matsuda, M Fukasawa, Y Takao, T Tatsumi, K Eriguchi, ... Japanese Journal of Applied Physics 49 (8S1), 08JD02, 2010 | 54 | 2010 |
| Two-dimensional particle-in-cell Monte Carlo simulation of a miniature inductively coupled plasma source Y Takao, N Kusaba, K Eriguchi, K Ono Journal of Applied Physics 108 (9), 2010 | 50 | 2010 |
| Model for bias frequency effects on plasma-damaged layer formation in Si substrates K Eriguchi, Y Nakakubo, A Matsuda, Y Takao, K Ono Japanese Journal of Applied Physics 49 (5R), 056203, 2010 | 47 | 2010 |
| Modeling of ion-bombardment damage on Si surfaces for in-line analysis A Matsuda, Y Nakakubo, Y Takao, K Eriguchi, K Ono Thin Solid Films 518 (13), 3481-3486, 2010 | 47 | 2010 |
| Plasma chemical behaviour of reactants and reaction products during inductively coupled CF4 plasma etching of SiO2 H Fukumoto, I Fujikake, Y Takao, K Eriguchi, K Ono Plasma Sources Science and Technology 18 (4), 045027, 2009 | 47 | 2009 |
| Modifications of plasma density profile and thrust by neutral injection in a helicon plasma thruster K Takahashi, Y Takao, A Ando Applied Physics Letters 109 (19), 2016 | 45 | 2016 |
| Neutral-depletion-induced axially asymmetric density in a helicon source and imparted thrust K Takahashi, Y Takao, A Ando Applied Physics Letters 108 (7), 2016 | 43 | 2016 |
| Plasma-induced defect-site generation in Si substrate and its impact on performance degradation in scaled MOSFETs K Eriguchi, Y Nakakubo, A Matsuda, Y Takao, K Ono IEEE electron device letters 30 (12), 1275-1277, 2009 | 41 | 2009 |
| Numerical validation of axial plasma momentum lost to a lateral wall induced by neutral depletion Y Takao, K Takahashi Physics of plasmas 22 (11), 2015 | 40 | 2015 |
| Effects of straggling of incident ions on plasma-induced damage creation in “fin”-type field-effect transistors K Eriguchi, A Matsuda, Y Takao, K Ono Japanese Journal of Applied Physics 53 (3S2), 03DE02, 2014 | 37 | 2014 |
| Numerical and experimental study of microwave-excited microplasma and micronozzle flow for a microplasma thruster T Takahashi, Y Takao, K Eriguchi, K Ono Physics of plasmas 16 (8), 2009 | 37 | 2009 |
| High-performance planar-type electron source based on a graphene-oxide-semiconductor structure K Murakami, J Miyaji, R Furuya, M Adachi, M Nagao, Y Neo, Y Takao, ... Applied physics letters 114 (21), 2019 | 36 | 2019 |
| Modeling and simulation of nanoscale surface rippling during plasma etching of Si under oblique ion incidence H Tsuda, Y Takao, K Eriguchi, K Ono Japanese Journal of Applied Physics 51 (8S1), 08HC01, 2012 | 35 | 2012 |
| Microfabricated emitter array for an ionic liquid electrospray thruster K Nakagawa, T Tsuchiya, Y Takao Japanese Journal of Applied Physics 56 (6S1), 06GN18, 2017 | 34 | 2017 |
| Plasma diagnostics and thrust performance analysis of a microwave-excited microplasma thruster Y Takao, K Ono, K Takahashi, K Eriguchi Japanese journal of applied physics 45 (10S), 8235, 2006 | 34 | 2006 |
| Surface roughening and rippling during plasma etching of silicon: Numerical investigations and a comparison with experiments H Tsuda, N Nakazaki, Y Takao, K Eriguchi, K Ono Journal of Vacuum Science & Technology B 32 (3), 2014 | 32 | 2014 |
Kazunori TakahashiTohoku UniversityVerified email at ecei.tohoku.ac.jp
