In-line metrology of nanoscale features in semiconductor manufacturing systems TF Yao, A Duenner, M Cullinan Precision Engineering 47, 147-157, 2017 | 44 | 2017 |
In-line dimensional metrology in nanomanufacturing systems enabled by a passive semiconductor wafer alignment mechanism TF Yao, A Duenner, M Cullinan Journal of Micro-and Nano-Manufacturing 5 (1), 011001, 2017 | 16 | 2017 |
Techniques for improving a fiber scanning system TM Dalrymple, A Lopez, WK Jones, AC Duenner US Patent 10,502,948, 2019 | 15 | 2019 |
Microstructured fiber optic oscillator and waveguide for fiber scanner TM Dalrymple, C Carlisle, J Schaefer, AC Duenner, V Mathur US Patent 10,451,868, 2019 | 6 | 2019 |
In-line, wafer-scale inspection in nano-fabrication systems TF Yao, A Duenner, MA Cullinan ASPE 2015 annual meeting, 2015 | 6 | 2015 |
Passive semiconductor wafer alignment mechanism to support in-line atomic force microscope metrology A Duenner, MA Cullinan ASPE 2015 Annual Meeting, Austin, TX, Nov, 1-6, 2015 | 5 | 2015 |
Buckling mode actuation of fiber scanner to increase field of view TM Dalrymple, AC Duenner, AD Carlomagno, X Zhang, MR Johnson, ... US Patent 10,422,991, 2019 | 4 | 2019 |
Mechanical joint for use in fiber optic imaging systems X Zhang, V Mathur, MR Johnson, TM Dalrymple, C Andrew, ... | 2 | 2021 |
Buckling mode actuation of fiber scanner to increase field of view TM Dalrymple, AC Duenner, AD Carlomagno, X Zhang, MR Johnson, ... US Patent 10,718,941, 2020 | 2 | 2020 |
Quick approach mechanism for tip-based in-line nanometrology systems TF Yao, AC Duenner, MA Cullinan Proceedings - ASPE 2016 Annual Meeting, 2016 | 2 | 2016 |
Buckling mode actuation of fiber scanner to increase field of view TM Dalrymple, AC Duenner, AD Carlomagno, X Zhang, MR Johnson, ... US Patent 11,156,827, 2021 | 1 | 2021 |
Microstructured fiber optic oscillator and waveguide for fiber scanner TM Dalrymple, C Carlisle, J Schaefer, AC Duenner, V Mathur US Patent 10,976,540, 2021 | 1 | 2021 |
Optical and functional metrology of microstructured optical fibers TM Dalrymple, AC Duenner, M Schmitt US Patent 10,830,667, 2020 | 1 | 2020 |
Techniques for improving a fiber scanning system TM Dalrymple, A Lopez, WK Jones, AC Duenner US Patent 10,775,611, 2020 | 1 | 2020 |
A low-cost, automated wafer loading system with submicron alignment accuracy for nanomanufacturing and nanometrology applications A Duenner, TF Yao, B De Hoyos, M Gonzales, N Riojas, M Cullinan Journal of Micro-and Nano-Manufacturing 4 (4), 041006, 2016 | 1 | 2016 |
Multiple degree of freedom hinge systems and eyewear devices comprising such hinge systems A Lopez, AC Duenner US Patent App. 18/339,894, 2023 | | 2023 |
Multiple degree of freedom hinge systems and eyewear devices comprising such hinge systems A Lopez, AC Duenner US Patent 11,726,347, 2023 | | 2023 |
Buckling mode actuation of fiber scanner to increase field of view TM Dalrymple, AC Duenner, AD Carlomagno, X Zhang, MR Johnson, ... US Patent 11,630,297, 2023 | | 2023 |
Microstructured fiber optic oscillator and waveguide for fiber scanner TM Dalrymple, C Carlisle, J Schaefer, AC Duenner, V Mathur US Patent 11,556,001, 2023 | | 2023 |
Techniques for improving a fiber scanning system TM Dalrymple, A Lopez, WK Jones, AC Duenner US Patent 11,409,100, 2022 | | 2022 |