Nanoprobes for near-field optical microscopy manufactured by substitute-sheath etching and hollow cathode sputtering

M Chaigneau, G Ollivier, T Minea… - Review of scientific …, 2006 - aip.scitation.org
This article reports a new approach for probe manufacturing, which is the key component in
scanning near-field optical microscope (SNOM). The wet-etching process, to create the tip at
the apex of a tapered fiber, has been optimized. Typical tip features are short tapers, large …