Simultaneous thin‐film stress and mass‐change measurements using quartz resonators
EP EerNisse - Journal of applied physics, 1972 - pubs.aip.org
It is shown theoretically and experimentally that stresses in a thin film on a quartz resonator
surface can set up sufficient static mechanical bias in the resonator to cause measurable
shifts in the resonant frequency through finite strain effects. In particular, it is found that if a 5‐
MHz AT‐cut fundamental mode and a 6.19‐MHz BT‐cut fundamental mode are subjected to
the same combination of thin‐film stress and mass/cm2 changes on their surfaces, the sum
of the observed frequency shifts is proportional to the mass/cm2 change alone, and the …
surface can set up sufficient static mechanical bias in the resonator to cause measurable
shifts in the resonant frequency through finite strain effects. In particular, it is found that if a 5‐
MHz AT‐cut fundamental mode and a 6.19‐MHz BT‐cut fundamental mode are subjected to
the same combination of thin‐film stress and mass/cm2 changes on their surfaces, the sum
of the observed frequency shifts is proportional to the mass/cm2 change alone, and the …